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Issue 5, 2012
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Rapid, sensitive, and multiplexed on-chip optical sensors for micro-gas chromatography

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Abstract

We developed and characterized a rapid, sensitive and integrated optical vapor sensor array for micro-gas chromatography (μGC) applications. The sensor is based on the Fabry–Pérot (FP) interferometer formed by a micrometre-thin vapor-sensitive polymer layer coated on a silicon wafer. The thickness and the refractive index of the polymer vary in response to the vapor analyte, resulting in a change in the reflected intensity of the laser impinged on the sensor. In our study, four different polymers were coated on four wells pre-etched on a silicon wafer to form a spatially separated sensor array. A CMOS imager was employed to simultaneously monitor the polymers' response, thus enabling multiplexed detection of a vapor analyte passing through the GC column. A sub-second detection time was demonstrated. In addition, a sub-picogram detection limit was achieved, representing orders of magnitude improvement over the on-chip vapor sensors previously reported.

Graphical abstract: Rapid, sensitive, and multiplexed on-chip optical sensors for micro-gas chromatography

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Article information


Submitted
24 Sep 2011
Accepted
22 Nov 2011
First published
16 Jan 2012

Lab Chip, 2012,12, 901-905
Article type
Paper

Rapid, sensitive, and multiplexed on-chip optical sensors for micro-gas chromatography

K. Reddy, Y. Guo, J. Liu, W. Lee, M. K. Khaing Oo and X. Fan, Lab Chip, 2012, 12, 901
DOI: 10.1039/C2LC20922E

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