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This note introduced a complete fabrication strategy of Parylene C-caulked PDMS (pcPDMS) for low permeability required microfluidics applications. The bonding issue enrolled in the pcPDMS fabrication was solved based on careful surface analyses of the Parylene C caulked status in the PDMS matrix.

Graphical abstract: Studies on Parylene C-caulked PDMS (pcPDMS) for low permeability required microfluidics applications

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