Suspended microchannel resonators with piezoresistive sensors
Abstract
Precision frequency detection has enabled the suspended microchannel resonator (
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* Corresponding authors
a
Department of Biological Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA
E-mail:
scottm@media.mit.edu
Fax: +1-617-253-5102
Tel: +1-617-253-5039
b Current address: Department of Mechanical Engineering, Sogang University, Seoul, Korea
c Harvard-MIT Division of Health Sciences and Technology, Massachusetts Institute of Technology, Cambridge, MA, USA
d Innovative Micro Technology, Santa Barbara, CA, USA
e Microsystems Technology Laboratories, Massachusetts Institute of Technology, Cambridge, MA, USA
f Affinity Biosensors, Santa Barbara, CA, USA
g Max Planck Institute for Biophysical Chemistry, Göttingen, Germany
h Koch Institute for Integrative Cancer Research, Massachusetts Institute of Technology, Cambridge, MA, USA
Precision frequency detection has enabled the suspended microchannel resonator (
J. Lee, R. Chunara, W. Shen, K. Payer, K. Babcock, T. P. Burg and S. R. Manalis, Lab Chip, 2011, 11, 645 DOI: 10.1039/C0LC00447B
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