SRXRF-measurements at non-planar objects: automatic determination of the angle of incidence of the exciting X-ray

Abstract

For quantitative SRXRF measurements the angle of incidence of the incoming X-ray beam is an important factor. When the sample is focused by a long-range-microscope, the determination of the angle can be automatized using a simple algorithm. This was developed to improve the orientation of especially round or ornate samples. As a side effect the three dimensional surface can be reconstructed, too.