Spatial characterization of pressure-based plasma regimes in a radiofrequency glow discharge by using optical emission spectroscopy†‡
Abstract
A new experimental set-up has been developed in order to perform spatially resolved measurements of the optical emission in a radiofrequency glow discharge (rf-GD). The emitted radiation is not only detected through an end-on window (as usually done in commercial
- This article is part of the themed collection: Glow Discharge Spectroscopy