A routine procedure for the characterisation of polycapillary X-ray semi-lenses in parallelising mode with SEM/EDS
Abstract
The accurate knowledge of the properties of polycapillary X-ray semi-lenses has a significant influence on the quantitative results in a widespread field of applications involving microfocus X-ray beams. A routine procedure for the characterisation of a polycapillary X-ray semi-lens with a scanning electron microscope (