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Issue 5, 2011
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A rapid and economical method for profiling feature heights during microfabrication

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Abstract

Quality control is an important and integral part to any microfabrication process. While the widths of features often can be easily assessed by light microscopy, the heights of the fabricated structures are more difficult to determine. Here, we present a rapid, accurate, and low-cost method to measure the heights of microfabricated structures during and after the fabrication process. This technique is based on white-light interferometry, which offers accuracy on the submicrometre scale.

Graphical abstract: A rapid and economical method for profiling feature heights during microfabrication

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Article information


Submitted
01 Oct 2010
Accepted
15 Dec 2010
First published
13 Jan 2011

Lab Chip, 2011,11, 974-977
Article type
Technical Note

A rapid and economical method for profiling feature heights during microfabrication

G. S. Yen, B. S. Fujimoto, T. Schneider, D. T.K. Huynh, G. D.M. Jeffries and D. T. Chiu, Lab Chip, 2011, 11, 974
DOI: 10.1039/C0LC00470G

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