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Issue 7, 2011
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Rapid prototyping of microstructures in polydimethylsiloxane (PDMS) by direct UV-lithography

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Abstract

Microstructuring of polydimethylsiloxane (PDMS) is a key step for many lab-on-a-chip (LOC) applications. In general, the structure is generated by casting the liquid prepolymer against a master. The production of the master in turn calls for special equipment and know how. Furthermore, a given master only allows the reproduction of the defined structure. We report on a simple, cheap and practical method to produce microstructures in already cured PDMS by direct UV-lithography followed by chemical development. Due to the available options during the lithographic process like multiple exposures, the method offers a high design flexibility granting easy access to complex and stepped structures. Furthermore, no master is needed and the use of pre-cured PDMS allows processing at ambient (light) conditions. Features down to approximately 5 µm and a depth of 10 µm can be realised. As a proof of principle, we demonstrate the feasibility of the process by applying the structures to various established soft lithography techniques.

Graphical abstract: Rapid prototyping of microstructures in polydimethylsiloxane (PDMS) by direct UV-lithography

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Supplementary files

Article information


Submitted
05 Nov 2010
Accepted
24 Jan 2011
First published
16 Feb 2011

Lab Chip, 2011,11, 1368-1371
Article type
Technical Note

Rapid prototyping of microstructures in polydimethylsiloxane (PDMS) by direct UV-lithography

T. Scharnweber, R. Truckenmüller, A. M. Schneider, A. Welle, M. Reinhardt and S. Giselbrecht, Lab Chip, 2011, 11, 1368
DOI: 10.1039/C0LC00567C

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