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Issue 38, 2011
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A facile route to patterned epitaxial ZnO nanostructures by soft lithography

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Abstract

Combining two robust, facile, and low cost techniques—nanoimprint lithography and low temperature aqueous solution phase epitaxy of ZnO—enabled the fabrication of nanostructured single crystal surfaces. Various patterns were fabricated with sub-micron resolution, including an array of 70 nm diameter posts. The method requires no vacuum equipment and has a maximum process temperature of 110 °C.

Graphical abstract: A facile route to patterned epitaxial ZnO nanostructures by soft lithography

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Supplementary files

Article information


Submitted
07 Jul 2011
Accepted
05 Aug 2011
First published
19 Aug 2011

J. Mater. Chem., 2011,21, 14417-14419
Article type
Communication

A facile route to patterned epitaxial ZnO nanostructures by soft lithography

J. J. Richardson, D. Estrada, S. P. DenBaars, C. J. Hawker and L. M. Campos, J. Mater. Chem., 2011, 21, 14417
DOI: 10.1039/C1JM13167B

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