- Article type
- 20 May 2011
- 15 Aug 2011
- First published
- 15 Sep 2011
Iridium metal and
iridium oxide thin films grown by atomic layer deposition at low temperatures
J. Hämäläinen, T. Hatanpää, E. Puukilainen, T. Sajavaara, M. Ritala and M. Leskelä, J. Mater. Chem., 2011, 21, 16488 DOI: 10.1039/C1JM12245B
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