Study of epitaxial selective area growth In1−xGaxAs films by synchrotronμ-XRF mapping
Abstract
We present an analytical method allowing to quantitatively extract, from a space resolved
* Corresponding authors
a
Department of Inorganic, Materials and Physical Chemistry, NIS Centre of Excellence and INSTM unit, University of Turin, Via P. Giuria 7, Turin, Italy
E-mail:
carlo.lamberti@unito.it
b
Department of General and Organic Chemistry, NIS Centre of Excellence, University of Turin, C.so Massimo D'Azeglio 48, Turin, Italy
E-mail:
angelo.agostino@unito.it
c Avago Technologies Italy S.r.l., Torino Technology Centre, Via G. Schiaparelli 12, Turin, Italy
We present an analytical method allowing to quantitatively extract, from a space resolved
L. Mino, A. Agostino, S. Codato and C. Lamberti, J. Anal. At. Spectrom., 2010, 25, 831 DOI: 10.1039/C000435A
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