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Issue 4, 2010
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Rapid, cost-efficient fabrication of microfluidic reactors in thermoplastic polymers by combining photolithography and hot embossing

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Abstract

We report a cost-efficient and easy to implement process for fabricating microfluidic reactors in thermoplastic materials. The method includes (i) the fabrication of an imprint template (master), which consists of a photoresist deposited on a metal plate; (ii) the thermoembossing of the reactor features into polymer sheets; (iii) the activation of the embossed and planar thermoplastic surfaces; and (iv) the low-temperature bonding of these surfaces. The generality of the method is established by fabricating microfluidic reactors with a complex geometry in a range of thermoplastic polymers, including cycloolefin, polycarbonate, and UV-transparent acrylic polymers and by the multiple, high-fidelity use of the master.

Graphical abstract: Rapid, cost-efficient fabrication of microfluidic reactors in thermoplastic polymers by combining photolithography and hot embossing

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Article information


Submitted
11 Sep 2009
Accepted
11 Nov 2009
First published
01 Dec 2009

Lab Chip, 2010,10, 522-524
Article type
Technical Note

Rapid, cost-efficient fabrication of microfluidic reactors in thermoplastic polymers by combining photolithography and hot embossing

J. Greener, W. Li, J. Ren, D. Voicu, V. Pakharenko, T. Tang and E. Kumacheva, Lab Chip, 2010, 10, 522
DOI: 10.1039/B918834G

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