Vertical arrays of nanofluidic channels fabricated without nanolithography†
Abstract
Vertical arrays of sealed nanofluidic channels, in which both cross-sectional dimensions are controllable down to 10 nm, were fabricated by selective side
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* Corresponding authors
a
L-NESS, Dipartimento di Fisica, Politecnico di Milano, Via Anzani 42, Como, Italy
E-mail:
roman.sordan@como.polimi.it
Fax: +39 031 332 7617
Tel: +39 031 332 7622
b Dipartimento di Medicina Sperimentale, Università degli Studi di Milano-Bicocca, Via Cadore 48, Monza, Italy
c L-NESS, Dipartimento di Scienza dei Materiali, Università degli Studi di Milano-Bicocca, Via R. Cozzi 53, Milano, Italy
d Max-Planck-Institut für Festkörperforschung, Heisenbergstr. 1, Stuttgart, Germany
e Institute de Physiques des Nanostructures, Ecole Polytechnique Fédérale de Lausanne, Lausanne, Switzerland
Vertical arrays of sealed nanofluidic channels, in which both cross-sectional dimensions are controllable down to 10 nm, were fabricated by selective side
R. Sordan, A. Miranda, F. Traversi, D. Colombo, D. Chrastina, G. Isella, M. Masserini, L. Miglio, K. Kern and K. Balasubramanian, Lab Chip, 2009, 9, 1556 DOI: 10.1039/B819520J
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