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Abstract | Cited by

Photolithographically defined monolithic membrane valves utilizing Fluorocur™ perfluoropolyether (PFPE) were fabricated and characterized to be essentially unaltered after one million actuations and exposure to the environmental stresses associated with in situ exploration of Mars.

Graphical abstract: Monolithic photolithographically patterned Fluorocur™ PFPE membrane valves and pumps for in situ planetary exploration

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