A class of low voltage, elastomer–metal ‘wet’ actuators for use in high-density microfluidics†
Abstract
We report a class of ‘wet’ MEMS elastomer–metal electrostatic actuators which can actuate in air, oil or
* Corresponding authors
a
Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, USA
E-mail:
tbansal@umich.edu
b Department of Mechanical Engineering, University of Michigan, Ann Arbor, USA
c Department of Biomedical Engineering, University of Michigan, Ann Arbor, USA
We report a class of ‘wet’ MEMS elastomer–metal electrostatic actuators which can actuate in air, oil or
T. Bansal, M. Chang and M. M. Maharbiz, Lab Chip, 2007, 7, 164 DOI: 10.1039/B614419E
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