Thin films of monoclinic WO3 and WO3−x have been synthesized by atmospheric pressure chemical vapour deposition from WCl6 and three oxygen containing precursors; water, ethanol and ethanoic anhydride. A wide variation in the colour, crystal morphology and preferred orientation of the films was observed, depending on the chosen oxygen source. In particular contrast were the films formed from WCl6 and ethanol, which were blue and had needle-like crystallites, and those formed from WCl6 and water, which were yellow and had hexagonal shaped crystallites. Studies were also undertaken to form films from WCl6, ethanol and water simultaneously, in which the ratio of ethanol to water was varied, and this led to films in which the crystal morphology and orientation could be controlled.
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