Facile fabrication of microfluidic systems using electron beam lithography
Abstract
We present two fast and generic methods for the fabrication of polymeric microfluidic systems using
* Corresponding authors
a
Department of Electrical Engineering, Indian Institute of Technology Bombay, Mumbai 400076, India
E-mail:
aniruddh@ee.iitb.ac.in
Fax: +91-22-25723707
Tel: +91-22-25764481
We present two fast and generic methods for the fabrication of polymeric microfluidic systems using
P. Mali, A. Sarkar and R. Lal, Lab Chip, 2006, 6, 310 DOI: 10.1039/B510992B
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