AC electroosmotic pump with bubble-free palladium electrodes and rectifying polymer membrane valves

We present the design, test and theoretical analysis of a novel micropump. The purpose is to make a pump with large flow rate (≈10 µL min⁻¹) and high pressure capacity (≈1 bar) powered by a low voltage ΔV < 30 V. The pump is operated in AC mode with an electroosmotic actuator in connection with a full wave rectifying valve system. Individual valves are based on a flexible membrane with a slit. Bubble-free palladium electrodes are implemented in order to increase the range of applications and reduce maintenance.