Well-ordered TiO2nanostructures fabricated using surface relief gratings on polymer films

Abstract

Well-ordered TiO₂ nanostructures such as 1-dimensional nanowire arrays, 2-dimensional square and hexagonal hole arrays, and 3-dimensional wire junction arrays were fabricated by a simple, controllable, economical, and reproducible method using surface relief gratings on azobenzene-functionalized polymer films as a template in the sol–gel reaction of a Ti precusor. In addition, as an application of TiO₂ nanostructure, transparent electrodes were patterned by selective dry etching with the TiO₂ nanowire array etch mask. Scanning electron microscope and atomic force microscope images confirmed the successful formation of a variety of well-ordered TiO₂ nanostructures and nanopatterning of transparent electrodes.