Simultaneous LIBS and LA-ICP-MS analysis of industrial samples

Abstract

A compact simultaneous LIBS–LA-ICP-MS setup was developed to analyze the elemental distribution of both major and trace elements in an industrial multi-phase magnesium-based alloy sample. Fundamental parameters of laser-induced plasmas, including the influence of different gas atmospheres (air, helium, argon) together with the laser wavelength in the UV region (193 nm) were studied and optimized. The capabilities for spatial and depth-resolved analysis were investigated by optimizing the laser spot dimension and the number of individual laser shots. Multi-element mappings of an area of 1000 × 1000 μm² were performed and the results for the main elements Mg, Al, and Zn were compared between the two methods for the same sample area. A calibration approach using the signal intensities from LA-ICP-MS for internal standardization of the LIBS data was investigated.