Microfluidic operations using deformable polymer membranes fabricated by single layer soft lithography

Abstract

We show that it is possible to use single layer soft lithography to create deformable polymer membranes within microfluidic chips for performing a variety of microfluidic operations. Single layer microfluidic chips were designed, fabricated, and characterized to demonstrate pumping, sorting, and mixing. Flow rates as high as 0.39 µl min⁻¹ were obtained by peristaltic pumping using pneumatically-actuated membrane devices. Sorting was attained via pneumatic actuation of membrane units placed alongside the branch channels. An active mixer was also demonstrated using single-layer deformable membrane units.