Synthesis and characterization of La2−xBaxCuO4+δ thin film through a simple MOCVD approach

Abstract

Superconducting La_2−xBa_xCuO_4+δ (LBCO) films have been deposited on 10 × 10 mm² (100) LaAlO₃ substrates using an in-situ MOCVD process and adopting the multi-component single source approach. Highly c-axis oriented films are fabricated and X-ray diffraction (XRD) (103) pole figures point to the epitaxial nature of the LBCO films. Scanning electron and atomic force microscopy images show highly homogeneous surfaces. Energy dispersive (EDX) and wavelength dispersive X-ray (WDX) analyses show a good homogeneity over all the 10 × 10 mm² substrate and the absence of any F or C contaminations.