Issue 8, 2003

The deposition of thin films of CuME2 by CVD techniques (M = In, Ga and E = S, Se)

Abstract

Thin film(s) of chalcopyrite CuME2 (where M = In or Ga; E = S or Se) have been grown by low-pressure metal-organic chemical vapour deposition (LP-MOCVD) or aerosol-assisted chemical vapour deposition (AACVD) using the precursors M(E2CNMenHex)3 and Cu(E2CNMenHex)2. Films were grown on various substrates between 350–500 °C and characterized by X-ray diffraction, XPS, optical spectroscopy (UV/Vis), EDAX and scanning electron microscopy.

Graphical abstract: The deposition of thin films of CuME2 by CVD techniques (M = In, Ga and E = S, Se)

Supplementary files

Article information

Article type
Paper
Submitted
13 Mar 2003
Accepted
01 May 2003
First published
25 Jun 2003

J. Mater. Chem., 2003,13, 1942-1949

The deposition of thin films of CuME2 by CVD techniques (M = In, Ga and E = S, Se)

J. Park, M. Afzaal, M. Kemmler, P. O'Brien, D. J. Otway, J. Raftery and J. Waters, J. Mater. Chem., 2003, 13, 1942 DOI: 10.1039/B302896H

To request permission to reproduce material from this article, please go to the Copyright Clearance Center request page.

If you are an author contributing to an RSC publication, you do not need to request permission provided correct acknowledgement is given.

If you are the author of this article, you do not need to request permission to reproduce figures and diagrams provided correct acknowledgement is given. If you want to reproduce the whole article in a third-party publication (excluding your thesis/dissertation for which permission is not required) please go to the Copyright Clearance Center request page.

Read more about how to correctly acknowledge RSC content.

Spotlight

Advertisements