Issue 9, 2003

Erosion rate measurements for GD-OES

Abstract

For GD-OES the sputtering rate of standard reference materials is needed for calibration purposes. A modern optical profilometer is used to measure 3D crater profiles. The crater volume, the erosion and the sputtering rate is calculated. A series of measurements was performed at reference materials and different plasma conditions. The plot of the reduced sputtering rates versus voltage proves the validity of the Boumans formula.

Article information

Article type
Paper
Submitted
13 Jun 2003
Accepted
08 Jul 2003
First published
13 Aug 2003

J. Anal. At. Spectrom., 2003,18, 1141-1145

Erosion rate measurements for GD-OES

L. Wilken, V. Hoffmann and K. Wetzig, J. Anal. At. Spectrom., 2003, 18, 1141 DOI: 10.1039/B306768H

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