Ultrathin Y2O3-stabilized ZrO2 films have been prepared using Langmuir–Blodgett (LB) films as precursors. The β-diketonate complexes zirconium(IV) 2,2,6,6-tetramethylheptanedionate (Zr(tmhd)4) and yttrium(III) 2,2,6,6-tetramethylheptanedionate (Y(tmhd)3) were chosen as the “surface ions” which can combine with arachidic acid (AA) to form uniform mixed monolayers on pure water. Y-type LB films were fabricated by depositing the mixed monolayers with a mixing ratio of Y(tmhd)3/Zr(tmhd)4/AA = 1∶4.5∶11. The YSZ films were obtained through a combination of low temperature ultra-violet/ozone (UVO) decomposition and annealing treatments at high temperature. X-Ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) measurements
demonstrate that the final films are a single YSZ phase with a fluorite cubic structure and the composition of the films can be well controlled throughout the whole process. Atomic force microscopy (AFM) and cross-section scanning electronic microscopy (SEM) have been employed to reveal the character of the final films.
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