Issue 21, 2002

Titanium imido complexes as precursors to titanium nitride

Abstract

Treatment of TiCl4 with 2–4 fold excess of ButN(H)SiMe3 in CH2Cl2 resulted in the formation of orange crystals of [TiCl2(NBut)(NH2But)]4, the X-ray crystal structure of which has been determined. In the presence of excess pyridine, the reaction of TiCl4 with 1 equivalent of ButN(H)SiMe3 resulted in the isolation of the monomeric complex [TiCl2(NBut)(py)3]. Low pressure chemical vapour deposition of [TiCl2(NBut)(py)3] forms thin films of titanium nitride (a = 4.23(1) Å, XPS TiN0.75) at 600 °C.

Graphical abstract: Titanium imido complexes as precursors to titanium nitride

Supplementary files

Article information

Article type
Paper
Submitted
25 Apr 2002
Accepted
19 Aug 2002
First published
01 Oct 2002

J. Chem. Soc., Dalton Trans., 2002, 4055-4059

Titanium imido complexes as precursors to titanium nitride

C. J. Carmalt, A. C. Newport, I. P. Parkin, A. J. P. White and D. J. Williams, J. Chem. Soc., Dalton Trans., 2002, 4055 DOI: 10.1039/B204027C

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