Issue 6, 2002

Abstract

The electron temperature and electron number density of a laboratory-built low-pressure inductively coupled plasma (LP-ICP) were measured using a double Langmuir probe. The probe was composed of two 0.5 mm diameter tungsten wires and a magnesia sleeve shielding the wires that could be linearly moved in the central channel of the plasma by a vacuum linear-motion feedthrough. The role of parameters was studied at a height of 25 mm above the load coil, which yielded an electron temperature of 3–6 eV and an electron number density of 2.5–5 × 1013 cm−3. Less dependence on operating factors was noticed at higher observation heights, and when water loaded on the low-pressure plasma was increased, the electron temperature and electron number density were reduced, unlike with an atmospheric ICP.

Article information

Article type
Paper
Submitted
08 Nov 2001
Accepted
19 Apr 2002
First published
14 May 2002

J. Anal. At. Spectrom., 2002,17, 565-569

Diagnostic studies of a low-pressure inductively coupled plasma in argon using a double Langmuir probe

Y. Sung, H. B. Lim and R. S. Houk, J. Anal. At. Spectrom., 2002, 17, 565 DOI: 10.1039/B110219M

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