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Issue 6, 2002
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Abstract

The electron temperature and electron number density of a laboratory-built low-pressure inductively coupled plasma (LP-ICP) were measured using a double Langmuir probe. The probe was composed of two 0.5 mm diameter tungsten wires and a magnesia sleeve shielding the wires that could be linearly moved in the central channel of the plasma by a vacuum linear-motion feedthrough. The role of parameters was studied at a height of 25 mm above the load coil, which yielded an electron temperature of 3–6 eV and an electron number density of 2.5–5 × 1013 cm−3. Less dependence on operating factors was noticed at higher observation heights, and when water loaded on the low-pressure plasma was increased, the electron temperature and electron number density were reduced, unlike with an atmospheric ICP.

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Article information


Submitted
08 Nov 2001
Accepted
19 Apr 2002
First published
14 May 2002

J. Anal. At. Spectrom., 2002,17, 565-569
Article type
Paper

Diagnostic studies of a low-pressure inductively coupled plasma in argon using a double Langmuir probe

Y. Sung, H. B. Lim and R. S. Houk, J. Anal. At. Spectrom., 2002, 17, 565
DOI: 10.1039/B110219M

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