Rapid fabrication of microfluidic devices in poly(dimethylsiloxane) by photocopyingPresented at the 14th International Symposium on Microscale Separations and Analysis, Boston, January 13–18, 2001.

Abstract

A very simple and fast method for the fabrication of poly(dimethylsiloxane) (PDMS) microfluidic devices is introduced. By using a photocopying machine to make a master on transparency instead of using lithographic equipment and photoresist, the fabrication process is greatly simplified and speeded up, requiring less than 1.5 h from design to device. Through SEM characterization, any µ-channel network with a width greater than 50 µm and a depth in the range of 8–14 µm can be made by this method. After sealing to a Pyrex glass plate with micromachined platinum electrodes, a microfluidic device was made and the device was tested in FIA mode with on-chip conductometric detection without using either high voltage or other pumping methods.