Aerosol-assisted chemical vapour deposition (AACVD) of silver films from triphenylphosphine adducts of silver β-diketonates and β-diketoiminates, including the structure of [Ag(hfac)(PPh3)]

Abstract

Triphenylphosphine adducts of silver β-diketonates [AgL(PPh ₃ )] (L=acac, dpm, tfac, hfac, fod) and β-ketoiminates (L=hfacNhex, hfacNchex) have been synthesised and evaluated as precursors for the deposition of silver films using aerosol-assisted chemical vapour deposition methodology. The 1:1 stoichiometry of the adducts has been established by ³¹ P and ¹⁰⁹ Ag NMR and a crystal structure of [Ag(hfac)(PPh ₃ )]. The best films were obtained from the two β-ketoiminates, particularly L=hfacNhex. While [AgL(PPh ₃ )] (L=acac, dpm) gave almost no deposition, the complex with L=tfac gave a film comparable with the two β-ketoiminates while other films showed poor reflectivity (L=hfac, fod).