Article information
- Article type
- Paper
Permissions
![](https://www.rsc-cdn.org/oxygen/assets/icons/cross.png)
Influence of discharge parameters on the resultant sputtered crater shapes for a radio frequency glow discharge mass spectrometry source
T. E. Gibeau and R. Kenneth Marcus, J. Anal. At. Spectrom., 1998, 13, 1303 DOI: 10.1039/A803894E
To request permission to reproduce material from this article, please go to the Copyright Clearance Center request page.
If you are an author contributing to an RSC publication, you do not need to request permission provided correct acknowledgement is given.
If you are the author of this article, you do not need to request permission to reproduce figures and diagrams provided correct acknowledgement is given. If you want to reproduce the whole article in a third-party publication (excluding your thesis/dissertation for which permission is not required) please go to the Copyright Clearance Center request page.
Read more about how to correctly acknowledge RSC content.
![](https://www.rsc-cdn.org/oxygen/assets/icons/cross.png)
Social activity
Fetching data from CrossRef.
This may take some time to load.
Loading related content