Determination of phosphine by packed column gas chromatography with alkali flame ionisation detection

Abstract

A method for the determination of phosphine using packed column isothermal gas chromatography has been developed and validated. The limit of detection is 0.01 ng ml^–1 and response is linear over the ranges 0.1–1.0 and 2.5–25 ng ml^–1. Reproducibility at 0.1 ng ml^–1 was found to be 12.1% RSD. The method has been used to establish that phosphine is outgassed by newly fabricated semi-conductor devices containing phosphide compounds as dopants and is present in flatus of human origin.