Copper foils are oxidized by an inductively coupled low pressure oxygen plasma. The resulting oxides formed are identified by their FTIR and photoluminescence spectra. The nature of the oxidized layer and its thickness depend on the time of exposure to the plasma and on the operating conditions.
N. Bellakhal, K. Draou, J. L. Brisset and M. Lenglet, Anal. Commun., 1996, 33, 69 DOI: 10.1039/AC9963300069
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