Parameter optimization of a sealed inductively coupled plasma and the qualitative analysis of arsine are described. The choice and role of an additive gas, effect of flow rate, discharge container size and geometry, r.f. power and signal reproducibility are discussed. The qualitative determination of C, Fe, Ge, Mg, Mo, Ni, Sn and V impurities in arsine is established.
T. Jacksier and R. M. Barnes, J. Anal. At. Spectrom., 1992, 7, 839 DOI: 10.1039/JA9920700839
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