Formation of artifically controlled zirconium–hafnium multilayers on solid surface by use of metal–ligand bonds
Abstract
Films of alternately layered zirconium and hafnium phosphonates have been prepared on a silicon substrate by immersing a silicon water, modified with an anchoring agent [OHSiMe2–(CH2)3PO3H21], into aqueous solutions in the following order: ZrOCl2, H2O3P(CH2)10PO3H2(DBPA), HfOCl2, DBPA, ZrOCl2.