Inductively coupled plasma emission spectrometry in the analysis of rare earth-transition metal ultra-thin magnetic films

Abstract

A method has been developed for the accurate determination of the chemical composition of Tb-Fe ultra-thin films. It is based on dissolution and final analysis by inductively coupled plasma optical emission spectrometry (ICP-OES). Optimum ICP operating parameters, precision and detection limits for the determination of both Tb and Fe were established. Interference studies were carried out to investigate the possibility of extending the method to other ultra-thin magnetic films (rare earth-transition metal type). The “compensation compositions” at room temperature (RTCC) of such films obtained by ICP-OES measurements agree with values reported previously for thicker films of this type. The usefulness of ICP-OES for the precise analytical process control of these types of samples is assessed by considering the consistency between magnetic and ICP-OES measurements.