Issue 4, 1986

On the microstructure and composition of semi-insulating polycrystalline silicon (SIPOS)

Abstract

Using a range of electron spectroscopic (plasmon, core-electron-edge, X-ray emission) and electron microscopic (high-resolution imaging and optical diffractometry) techniques it is established that unannealed SIPOS is non-crystalline SiO0.50 ± 0.05 and that the annealed form contains microcrystallites of elemental silicon (100Å diameter).

Article information

Article type
Paper

J. Chem. Soc., Chem. Commun., 1986, 359-361

On the microstructure and composition of semi-insulating polycrystalline silicon (SIPOS)

J. Wong, J. M. Thomas, D. A. Jefferson, T. G. Sparrow and E. F. Koch, J. Chem. Soc., Chem. Commun., 1986, 359 DOI: 10.1039/C39860000359

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