Preparation, performance optimization and application progress of flexible lead zirconate titanate films

Abstract

Lead zirconate titanate (PZT) piezoelectric films are widely used in electronic devices due to their excellent piezoelectric properties. However, their poor adaptability to rigid substrates and material brittleness restrict their development in flexible electronics. This paper systematically reviews the key preparation technologies and performance optimization strategies of flexible PZT films: material composites (such as PZT/polyvinylidene fluoride (PVDF), PZT/polydimethylsiloxane (PDMS)), direct growth on flexible substrates (mica, stainless steel foil), substrate transfer (laser lift-off, chemical etching), and process optimization (low-temperature crystallization, gradient layer design) significantly enhance film flexibility, with elongation at break increased by more than 3 times and bending cycle life exceeding 10⁴ times. Meanwhile, piezoelectric coefficients (d₃₃) are improved through morphotropic phase boundary (MPB) regulation, element doping (La³⁺, Sm³⁺), and microstructural optimization. Flexible PZT films show important application values in wearable sensors, energy harvesting, bionic electronics, etc., such as human motion monitoring, self-powered nanogenerators, and bionic electronic skin. Future research should focus on the compatibility of high-temperature processes with flexible substrates, synergistic optimization of piezoelectricity and flexibility, and integrated device design.