Open Access Article
Benedetta Marmiroli
*a,
Sumea Klokic
*a,
Barbara Sartori
a,
Marie Reißenbüchela,
Alessio Turchetb and
Heinz Amenitsch
a
aInstitute of Inorganic Chemistry, Graz University of Technology, Graz, Austria. E-mail: benedetta.marmiroli@tugraz.at; sumea.klokic@tugraz.at
bElettra-Sincrotrone Trieste, Basovizza, Trieste, Italy
First published on 24th March 2026
Microfluidic devices are increasingly used in synchrotron-based experiments to deliver and probe liquid samples, offering advantages such as minimal sample consumption and reduced radiation damage. Despite their growing use, few devices have been specifically designed for monitoring liquids under photoexcitation, a promising approach for fast structural transitions. Here, a microfluidic device is presented that is transparent to X-rays in one direction and simultaneously transmits UV and visible light illumination to the sample in the perpendicular direction. The device is fabricated using lamination and UV lithography on a dry-film resist, eliminating the need for cleanroom facilities and simplifying production. Its multi-wavelength transparency was validated through UV-vis spectroscopy, where photoexcitation at different wavelengths induced reversible trans-to-cis isomerization of azobenzene and fluoro-azobenzene. X-ray transparency was verified through small-angle X-ray scattering (SAXS) measurements on hemoglobin and CO-ligated hemoglobin, both of which are sensitive to quaternary structural changes. These results confirm the suitability of the device for resolving protein structures and detecting subtle conformational changes of the type commonly encountered in photo-induced modulation. Initial proof-of-concept measurements demonstrate the feasibility of temperature-jump (T-jump) experiments, and the same architecture is readily extendable to time resolved pump–probe studies, providing a versatile platform for studying structural evolution in liquid samples using synchrotron SAXS.
However, such investigations remain challenging mainly due to the constraints imposed on suitable sample holders. In strongly absorbing samples, light penetration is limited, and consequently the illuminated volume must be comparable to or smaller than the optical attenuation length.21 Microfluidic channels address this issue effectively, as their geometry can be precisely tailored to achieve sample depths on the order of the optical penetration length, ensuring uniform excitation of the entire sample volume. For protein samples in particular, microfluidic devices have become increasingly popular,22,23 offering several key advantages: low sample consumption (critical for scarce protein systems), precise control of diffusion within microchannels (enabling rapid and accurate mixing), and efficient heat transfer due to their high surface-to-volume ratio, making them ideal for studying sensitive biological processes. Furthermore, microfluidic devices enhance the efficiency of solution-based synchrotron X-ray experiments, particularly SAXS, offering a versatile platform for investigating light-responsive samples while simultaneously enabling precise manipulation and delivery of liquids.24–26 Beyond these advantages, microfluidic devices connected to pumps continuously refresh the liquid sample in front of the X-ray beam, mitigating radiation damage effects provoked by its high intensity.
Although several microfluidic devices have been reported for light manipulation of samples,27 only a limited number allows multi-wavelength transparency.26,28 In a previously reported experiment, a square capillary (0.1 × 0.1 mm) connected to two reservoirs was used for manipulating starch granules with optical tweezers, while simultaneously measuring their structure with SAXS.29,30 However, the size of the device is not scalable and is therefore restricted to microfocus beamlines, where the dimension of the X-ray beam is smaller than the dimension of the channel, to avoid refraction effects due to the channel walls. A similar approach was used to combine optical tweezers with X-ray fluorescence.31 A customized observation cell32 and a Y shaped mixer connected to a quartz capillary33 were employed for SAXS and UV-vis studies of nanoparticles nucleation and growth. More recently, simultaneous UV-visible and X-ray absorption spectroscopy measurements were conducted on a Kenics mixer with a quartz capillary.34 Furthermore, a sample mixer based on careful material selection for UV and X-ray transparency was reported that allows spatially separated, yet continuous SAXS and UV-vis monitoring.35
In the particular case of photoexcitation experiments, microfluidic devices overcome some limitations encountered in standard capillaries, as they enable independent optimization with respect to the illumination geometry, to X-ray photon energy and brilliance, and to the sample type. In fact, light penetration, essential for maximizing the systems' photoresponse, depends on both the wavelength and the optical properties of the sample. Additionally, the sample concentration influences the intensity and possibility to resolve the X-ray scattering signal. This is also related to the brilliance and photon energy of the X-ray beam. Standard capillaries and other conventional sample holders are typically compatible only with specific X-ray sources or illumination set-ups. In this research, both the selection of materials and the development of a tailored fabrication protocol for a microfluidic device specifically engineered for combined photoexcitation and X-ray experiments are presented. A schematic of the device with its constituent materials is shown in Fig. 1(a), while the measurement concept to test the device is depicted in Fig. 2(a). To achieve both X-ray transparency along the beam path and illumination with UV and visible light in the perpendicular direction, SUEX dry film and impact modified poly(methyl methacrylate) (IM-PMMA) were selected. The microchannel was fabricated by a sequence of lamination and optical lithography steps, with the detailed protocol outlined in this work. While SUEX has previously been employed for microfluidic circuits,36,37 to our knowledge it has never been used in combination with X-ray techniques and in particular with SAXS. The ability to illuminate the sample at specific wavelengths in the UV and visible range was verified using UV-vis spectroscopy to detect the photoisomerization of azobenzene and fluoro-azobenzene. X-ray transparency was assessed using synchrotron SAXS measurements on Hb and HbCO protein solutions. The microfluidic channel depth was designed to remain below the UV attenuation length for photoactive proteins, based on photoexcitation studies in capillaries for HbCO. Collectively, these results demonstrate its proof of principle performance, confirming that the microfluidic device is suitable to study a broad range of photosensitive samples via independent synchrotron SAXS and visible spectroscopy experiments.
The fabrication process is considered green as it is based on the dry film SUEX,38 and it does not require a clean room facility. It can be described in the following steps:
i. Milling of a 125 μm IM-PMMA sheet (Goodfellow Cambridge Ltd, UK) and drilling of two 1 mm diameter holes in order to add the tubing for feeding the channel in a later stage (vide infra, step v). The shape of the IM-PMMA was chosen to ensure an unobstructed path for the scattered X-rays (Fig. 1(b) step i).
ii. Lamination of 250 μm thick SUEX photosensitive negative resist (micro resist technology GmbH, Germany) on IM-PMMA. The two slides were put on a thin aluminium plate between two 400 μm thick spacers and laminated at 60 °C for three times, in order to ensure the adhesion of the SUEX to IM-PMMA, using the rolling mill system Falcon K (BlackHole Lab, France) (Fig. 1(b) step ii).
iii. UV lithography. Exposure of the laminated SUEX on IM-PMMA to UV light through an optical mask made of an ink printed acetate transparent sheet. This rather simple mask was chosen as the dimensions of the channel and its features do not require high resolution. UV lithography was conducted using a Mask Aligner UV KUB-3 (Kloé, France) with a power density of 21 mW cm−2 for 32 s. The post exposure bake was performed in an oven (Carbolite Gero Ltd, UK) at 85 °C for 40 minutes. At the end of the heating treatment, the piece was left to cool to room temperature inside the oven. The SUEX was then developed in mr-DEV 600 solution (micro resist technology GmbH) for 60 min (Fig. 1(b) step iii). The developing time was carefully tuned, as the mr-DEV 600 is partially dissolving IM-PMMA. The piece was then rinsed in isopropanol (Merck KGaA, Darmstadt, Germany) and dried with a nitrogen stream.
iv. Sealing of the channel. A 100 μm thick SUEX was laminated on top of the channel at 50 °C for two times using the same aluminium slide with spacers as before (see step ii). Then UV lithography was performed without mask with a power density of 21 mW cm−2 for 21 s in order to crosslink the resist (Fig. 1(b) step iv). Post exposure bake was made at 85 °C for 40 minutes in the oven where afterwards the device was left cooling.
v. Connection of the microfluidic device to the tubes for liquid transfer. First, two cubes made of PMMA containing a channel through their center were glued to IM-PMMA in correspondence of its holes (Fig. 1(b) step v). Subsequently, tubes of 800 μm external diameter were inserted into the cubes and glued using standard acrylic glue.
An adequate stainless steel sample holder was fabricated to hold the microfluidic circuit both in front of the X-rays and the laser. An image of the mask, of a 250 μm SUEX channel, and of the final device after step iv is shown in Fig. S1 of SI. A picture of the microfluidic device mounted in the sample holder at the experimental station is shown in Fig. 2(c), a side view in Fig. 2(d), and a magnification of the top view in Fig. 2(e).
A Pilatus3 1 M detector was used (Dectris Ltd, Baden, Switzerland) with active area 169 × 179 mm2 and a pixel size of 172 μm, and the 2D detector images were azimuthally integrated using the data pipeline SAXSDOG, developed at the Austrian SAXS beamline for automatic data reduction.42 Normalization, background subtraction and data processing of the resulting 1D data were conducted with IGOR pro (Wavemetrics, Inc., Lake Oswego, OR).
The low q-range part (0.38–0.47 nm−1) of the scattering curves of the protein after buffer subtraction was considered to obtain the radius of gyration Rg,43 which is related to the dimension of the protein, according to eqn (S2) reported in paragraph 2 of SI. The upper limit of the q-range for Guinier approximation was selected following the guidelines for the publication of SAXS data of biomolecules in solution.44 The pair distance distribution function p(r), whose Fourier transformation averaged over all directions in space gives the scattering intensity I(q), defined by eqn (S3) in SI,43 was determined using the GNOM program from the ATSAS package 4.1.1.45 The invariant Q, second moment of the scattering curve which is related to the electron density of the sample, was determined following eqn (S4), while the correlation length lc, related to characteristic dimensions of the sample, was calculated using eqn (S5) as shown in the SI.43
Photoexcitation experiments performed in combination with SAXS measurements were accomplished using the optical on-line table available at the Austrian SAXS beamline.46 A schematic of the experimental setup is shown in Fig. 2(a), emphasizing the 513 nm laser light transferred via motorized optical mirrors and lenses to overlap spatially with the X-ray beam. The microfluidic channel was positioned on the sample holder with its UV-transparent IM-PMMA side facing the incoming laser.46 The light to initiate the photo-switch was delivered by the Yb:KGW femtosecond laser (PHAROS, Light Conversion, Lithuania), which allows to precisely control the power and thus the photoresponse of the sample. Photoexcitation experiments were conducted at three different laser powers by adjusting the laser transmission T at the sample plane: 2.6 mW (T = 5%), 62 mW (T = 50%), and 182 mW (T = 100%). The laser spot size was set to 3.5 mm FWHM.
SAXS measurements were conducted on human hemoglobin (Hb). To evaluate the scattering signal of the protein in the microchannel when compared to a standard capillary, a protein solution and the related buffer were measured for 10 s using either a quartz capillary of 1.5 mm of diameter, or the microfluidic device connected to a syringe pump (TSE System GmbH, Germany) to infuse the sample at a flow rate of 0.25 μl min−1. As proof of principle of the performance of the microfluidic device under photoexcitation conditions, SAXS measurements were performed to study the structure of Hb stabilized by the presence of the ligand CO (HbCO) before and after green laser irradiation following previous literature protocols.12
The transparency of the materials in the UV or visible range was evaluated by UV-vis spectroscopy, as shown in Fig. S2 of SI. For the top lid, the IM-PMMA slide of 125 μm thickness was chosen, as it is transparent both to visible light and to UV light down to a wavelength of 280 nm, while the bottom lid made of SUEX dry film photoresist is optically transparent. The transparency of the fabricated microchannel is also shown.
As far as the X-rays transparency and scattering are concerned, the device has been tailored for the Austrian SAXS beamline. The beamline operates at 8 keV (X-ray wavelength 0.154 nm) with a photon flux density at sample of 1012 ph s−1 mm−2 at 2 GeV. The X-ray transparency of SUEX was evaluated by considering its major component (mixture of epoxy resins) and calculating the attenuation length, which is the depth into the material along the surface normal for which the X-rays intensity decays to 1/e of its value at the surface. The procedure and the details are described in paragraph 3 of SI. In the present case, the attenuation length varies from 1.58 mm to 1.64 mm (the attenuation length of quartz at 8 KeV is 0.11 mm). Based on these values, it is possible to calculate the transmission of 0.154 nm X-rays through 0.5 mm of SUEX, which is approximately 73%. Therefore, the material is sufficiently transparent. To quantify the scattering signal of SUEX, its absolute scattering probability was calculated measuring the scattering curve of a 0.5 mm thick SUEX film and of a calibrated glassy carbon slide of 1.05 mm, following the method already reported by our group.48 As the scattering probability of the glassy carbon, and the thickness of both glassy carbon and of SUEX are known, the absolute scattering probability can be derived from the measured scattering intensity curves. The result, presented in Fig. S3 of SI, shows that SUEX has an absolute scattering probability which is comparable to 1 mm of water at q values around 1 nm−1, i.e. 0.0016 (the scattering intensity of water is 1.6328 × 10−2 cm−1 at 293 K).49
To ensure a reliable measurement of the scattering signal of the sample within the microfluidic device, the channel dimensions were chosen to achieve sufficient sample volume. The depth of 0.25 mm is larger than the vertical dimension of the scattering X-ray beam (0.1 mm) allowing to measure only the centre of the channel and to avoid refraction or parasitic scattering effects due to the top or the bottom channel lid. The length of the central part of the microfluidic device, accessible to X-rays, is 15 mm to allow scanning in the y direction (see Fig. 2(a)). This could be relevant for time-resolved experiments under continuous flow, since every position corresponds to a different residence time of the sample inside the channel.
| AZB | 8F-AZB | |||
|---|---|---|---|---|
| Cuvette | Microchannel | Cuvette | Microchannel | |
| R%cis | 4.2% | 6.9% | 12% | 6% |
| R%trans | 3% | 7.4% | 16.5% | 37% |
It must be noted that in the case of AZB, both the cis and trans-isomer absorb at 430 nm, yet the observed changes are dominated by the individual cis or trans AZB-conformer dependent on the excitation wavelength used. For AZB, the converted fraction is rather low, yet the initial state as well as after 450 nm irradiation are equal.
For 8F-AZB, it is confirmed that irradiation at 532 nm induces a higher conversion to its cis isomer in the cuvette than in the microchannel. In contrast, the microchannel exhibits a greater conversion back to the trans-isomer compared to the cuvette. Although both photoswitches without prior treatment of the solutions can contain both isomers, 8F-AZB is particularly sensitive to ambient light promoting the conversion to the cis-isomer.51 If the initial cis fraction is already elevated, as can be seen for the microchannel in Fig. 3(e), the additional increase in cis population upon 532 nm irradiation is consequently reduced, which explains the comparably low Rcis%. Conversely, 450 nm light drives the cis-to-trans conversion of both the cis isomers generated during 532 nm illumination and those present in the initial state, leading to a significantly larger Rtrans% for the microchannel. This behaviour is also observed for AZB, despite the lower photoconversion percentage which could be due to the not optimal 365 nm excitation wavelength.
Interestingly, the initial and final states of AZB display an almost complete matching after the photoinduced cis–trans isomerizations: this confirms that fluorinated azobenzenes exhibit altered switching characteristics compared to AZB, including incomplete spectral recovery under visible irradiation.52
Taken together, the above results show that the effect of light irradiation is more evident when the solution is contained in the microchannel than in the cuvette. This enhanced response arises from the significantly shorter path length inside the microfluidic device, which allows more uniform excitation throughout the sample. Therefore, the microfluidic device enables efficient photoexcitation using both UV and visible light, demonstrating effective light penetration and optical performance.
Initially, Hb was measured in a standard 1.5 mm diameter quartz capillary, commonly used for SAXS experiments, which served as a reference for subsequent measurements performed in the microchannel. Five 10 s exposures were acquired, and the corresponding scattering curves were averaged.
The SAXS pattern with the Guinier fit and the Rg value are shown in Fig. 4(a). After the capillary measurements, the empty microfluidic channel was positioned for SAXS experiments. Its alignment to the X-ray beam was achieved by translating the device along the z axis while monitoring the transmission signal with a photodiode positioned on the beamstop. The variation in transmission through the device (top lid, channel walls, bottom lid) allowed the precise identification of the channel center, as shown in Fig. 2(b). Because the top and bottom lids absorb X-rays more than the channel walls, the center of the channel is therefore the one in which the transmission is relatively higher. After alignment, Hb and HbCO were measured while slowly flowing in the channel at 0.25 μl min−1. First, to assess radiation damage, 160 exposures of 10 s with 1 s delay were acquired for each protein. The first and last scattering curve were compared (Fig. S4 of SI) and no difference was observed. In addition, the invariant and the correlation length were calculated for each measurement (data not shown), presenting no variation and confirming the absence of radiation damage. Then, twenty 10 s exposures were collected both for Hb and for HbCO, and the average of the corresponding scattering curves with the Guinier fit are shown in Fig. 4(b). Finally, 40 exposures of 0.1 s were taken for HbCO and averaged (result shown in Fig. 4(c) together with the Guinier fit and Rg value).
A high protein concentration was intentionally used for both Hb and HbCO. High concentrations are usually employed for time-resolved pump–probe SAXS/WAXS studies of photosensitive proteins, as suggested by literature (i.e. 18–20 mg ml−1 for Sensory rhodopsin II,54 30 mg ml−1 for phytochromes,55 50 mg ml−1 for human cyclophilin A56 and for PYP,19 higher than 70 mg ml−1 for HbCO12). This is motivated by the need to resolve extremely subtle differences arising from the internal protein structure. Accordingly, the analysis focuses on differences in the scattering signal at higher q values, which are sensitive to internal structural features while being less affected by the aggregation effects that typically become relevant at such concentrations.
The internal volume of the device is small (10 μl), thus rendering such measurements efficient and economical, even with costly or limited protein samples. In principle, a dilution series could be performed for each protein to identify the optimal concentration for SAXS.
For the concentration tested here, aggregation was observed as indicated by the strong increase in scattering intensity at q < 0.2 nm−1 visible in the scattering curves displayed in Fig. 4. Nevertheless, this does not hinder comparison between the capillary and microchannel measurements. As shown in Fig. 4(a) and (b), the SAXS measurement of Hb in the microchannel is comparable to that collected in the standard capillary, demonstrating that the microfluidic device can be used to perform SAXS experiments under conditions equivalent to conventional setups. For both Hb and HbCO, determination of p(r) and fits of the indirect Fourier transform were obtained using the GNOM program,45 highlighting the ability of the device to distinguish subtle conformational changes in proteins (Fig. S5 of SI).
By averaging a sufficient number of frames, the resulting scattering curves present a good signal-to-noise even in the higher q range (q = 1–4 nm−1), allowing the detection of the difference between Hb and HbCO (Fig. 4(b)), which arise from the tertiary and quaternary structural changes.12
All Hb and HbCO curves were fitted in the same q range as for the capillary SAXS data to determine the radius of gyration Rg, where the lower q value was selected to minimize the effect of aggregation. The resulting Rg values shown in Fig. 4(b) and (c) were found consistent across all measurements within the experimental error, and in agreement with previously reported literature values (2.567 nm for Hb and 2.465 nm for HbCO),57 demonstrating that the fabricated microchannel allows SAXS measurements with short acquisition times while maintaining a good signal-to-noise ratio.
To show that smaller concentration of proteins can still be detected, a solution of 5 mg ml−1 of bovine serum albumin (BSA) in 50 mM HEPES buffer at pH 7.5 was measured for 30 s in the microchannel. The scattering curve, together with the fit of the Guinier approximation, is presented in Fig. 4(d). The Rg value is consistent with the one reported in literature (2.99 nm).58
To evaluate the device performance under photoexcitation conditions (513 nm), SAXS measurements for HbCO were first acquired for 10 s without illumination (laser OFF), followed by measurements of 10 s under continuous irradiation (laser ON). The scattering curves were compared. Three laser powers were employed to evaluate the effect of photodamage of the protein sample. For laser powers of 2.6 mW and 62 mW, the difference curves (ON minus OFF) oscillate around zero (Fig. S6), which indicates no photodamage. In contrast, at 182 mW, significant sample damage occurred without flowing the protein (Fig. S7(a)) as well as when flowing it at 100 μL min−1, which corresponds to a residence time of about 0.5 s under irradiation (Fig. S7(b)).
Protein damage typically leads to adhesion to the container walls, whether in capillaries or in microchannels. Hence, the microchannel was routinely cleaned after every protein measurement by flushing with Milli-Q water. The successful cleaning after the 160 frames radiation damage test on Hb and HbCO is demonstrated in Fig. S8(a). In the case of pronounced protein damage, like after laser irradiation at P = 182 mW, rinsing with water alone was not sufficient to remove residual protein from the channel. Therefore, a 1% v/v aqueous solution of Hellmanex III was employed, followed by thorough flushing with Milli-Q water. Owing to the chemical resistance of SUEX, the device could be efficiently cleaned and reused, as confirmed by the identical buffer scattering curves, recorded before and after treatment with Hellmanex III, in Fig. S8(b).
In the next step, experiments were conducted by continuously acquiring SAXS images with 0.1 s exposure time initially with the light source OFF, and then switching it ON to monitor the resulting changes. Again, the three laser power values used previously were tested (P = 2.6 mW, 62 mW and 182 mW), with HbCO and buffer measured under a flow rate of 100 μl min−1. For completeness, the empty microchannel was also measured. From each dataset, Q and the lc were determined as a function of time (Fig. 5 and S9 of SI). At 2.6 mW and 62 mW, lc remained constant for protein, buffer and empty device, whereas at 182 mW, changes were observed only for the protein. As lc reflects the characteristic dimensions of the protein, these results confirm the absence of laser damage at illumination powers of P = 2.6 and 62 mW, while at P = 182 mW pronounced photodamage occurs, leading to protein degradation.
When considering Q, no changes are observed at 2.6 mW, whilst at 62 mW and 182 mW, illumination produced a pronounced signal jump, that increased with laser power. This effect was observed for the protein, the buffer, and the empty channel. This behaviour is attributed to a laser-induced thermocapillary effect,27 where energy from the laser heats the microchannel and the sample, resulting in a scattering signal which is convoluted with the scattering signature of the protein structural changes. A similar effect was reported by Cammarata et al.,12 who suggested decoupling heating and photolysis contributions by subtracting the signal taken after photolysis recovery but before thermal relaxation (for HbCO, this occurs within 32 ms). It can also be noted that the magnitude of the thermal jump increases with laser power.
The microchannel could, in principle, be used for temperature-jump (T-jump) experiments. In such applications, the contribution of the channel itself must be considered, and the T-jump can be calibrated by measuring samples with known structural transitions at defined temperatures. This approach has been previously demonstrated by our group using a phospholipid for slow temperature changes,59 and by Prassl et al. using lipoproteins for fast variations.60
In the present work, the primary focus was on the development and validation of the microfluidic device, specifically assessing whether the optimized optical path length enables homogeneous photoexcitation of the entire sample volume, in contrast to conventional SAXS capillaries with larger path lengths. Here, the experiments were intentionally conducted on timescales substantially longer than those associated with photo-induced internal structural rearrangements of HbCO. Consequently, the measurements are not sensitive to transient structural intermediates but rather serve to validate the experimental approach and device performance, with photodamage representing the dominant observable effect under strong laser power conditions (P = 182 mW). Resolving the associated structural transition would therefore require a pump–probe experimental scheme. Under such conditions, the inherently low signal-to-noise ratio becomes a critical limitation. To optimize the detection of time-dependent scattering differences between the photoexcited and ground states, several strategies are essential, including the use of a high-brilliance beamline, the selection of an appropriate q-range sensitive to the relevant structural changes, and, most importantly, the optimization of the acquisition protocol through increased repetition (106) and extensive signal averaging. In the case of the present research conducted at the Austrian SAXS beamline@Elettra, for 1 s of exposure time in normal operation, around 12 minutes would be needed in a single pulse pump–probe configuration with standard hybrid filling.
These preliminary SAXS experiments demonstrate that the described microfluidic device could be used for photoexcitation or T-jump studies on proteins, as well as on other photosensitive samples, highlighting its versatility and potential for a wide range of time-resolved structural investigations.
Supplementary information (SI) is available. See DOI: https://doi.org/10.1039/d5lc01116g.
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