Robert
Szczęsny
*ab,
Edward
Szłyk
b,
Marek A.
Wiśniewski
bc,
Tuan K. A.
Hoang
a and
Duncan H.
Gregory
*a
aWestCHEM, School of Chemistry, University of Glasgow, Glasgow, G12 8QQ, UK. E-mail: Duncan.Gregory@Glasgow.ac.uk
bNicolaus Copernicus University in Toruń, Faculty of Chemistry, 87-100 Toruń, Poland. E-mail: Robert.Szczesny@umk.pl
cINVEST-TECH R&D Center, 32-34 Plaska St., 87-100 Toruń, Poland
First published on 26th April 2016
The simple fluorinated precursor, copper(II) trifluoroacetate, Cu(CF3COO)2 can be effectively utilised in the synthesis of copper(I) nitride, Cu3N, powders and films by combinations of wet processing and gas–solid (ammonolysis) techniques. The resulting materials were characterized by powder X-ray diffraction (PXD), scanning electron microscopy (SEM) with energy dispersive X-ray spectroscopy (EDX), atomic force microscopy (AFM), diffuse reflectance UV-visible spectroscopy (DRUV-Vis), Raman spectroscopy, infrared spectroscopy (IR), thermogravimetric-differential thermal analysis-mass spectrometry (TG-DTA-MS) and nitrogen adsorption (BET) analysis. Moreover, variable temperature IR (VT-IR) studies of the solid phase were performed in situ during ammonolysis. Single-phase Cu3N powders composed of sub-micron scale platelets can be produced over relatively short reaction times. Materials prepared in this way are stoichiometric narrow band gap semiconductors. The same trifluoroacetate precursor was used to prepare nanostructured nitride films by spin coating. The surface microstructure was investigated and evaluated relative to films deposited by dip coating and nebulisation using the soluble carboxylate precursor.
In this work we describe the preparation of copper nitride by ammonolysis of copper trifluoroacetate, Cu(CF3COO)2 for the first time. The advantages of using this fluorinated ligand are two-fold: first, previous studies have indicated that the volatility of Ag(C2F5COO) and Ag(C3F7COO) under nitrogen is such that they can decompose at low temperatures via well-defined pathways to yield high purity products.28 Therefore, this type of compound has found application in chemical vapour deposition (CVD) processes.29,30 Given the standard enthalpy of formation for Cu3N (ΔHf = 74.5 kJ mol−1),31 it is vital to perform ammonolysis under a strict temperature regime. In this context, the thermolysis of copper(II) trifluoroacetate should occur below the decomposition temperature of copper nitride.32 Second, use of soluble salts offers the opportunity for facile, inexpensive solution-based methods to deposit precursor films for subsequent solid–vapour reactions. Hence, in this article, we report how copper(II) trifluoroacetate can be exploited to produce both powder and thin film samples of copper nitride. In each case, the precursor can be employed under relatively mild conditions to yield sub-micron sized crystalline products.
Ammonolysis experiments were performed in a horizontal tube furnace. In each reaction, up to 0.4 g of precursor powder was placed in an alumina boat (60 × 50 × 50 mm) and transferred to the furnace. In all cases the maximum temperatures were reached in ∼45 min and NH3 gas (BOC, 99.98%) was used as the nitriding agent. The detailed experimental conditions are listed in Table 1. Any adsorbed ammonia was removed by treating post-ammonolysed samples under vacuum (10−3 torr) at room temperature for 30 min.
All films were deposited onto 10 mm × 10 mm × 1 mm silicon substrates by spin coating. A saturated solution of copper(II) carboxylate in THF:
methanol (ACS, POCh) (5
:
1) was spun onto the substrate at 2000–5000 rpm for 30–120 s and each plate was subsequently dried at a rotation speed of 5000 rpm for 20 s. The coatings were then dried under vacuum for 1 h. Two alternative deposition methods were also assessed. First, the same solution as above was nebulised using a concentric glass nebulizer and the resulting mist was swept onto the silicon plate using compressed nitrogen. The carboxylate solution was deposited onto the plates in ∼30 s and the nozzle–substrate distance was 15 cm. Second, comparative dip-coating was performed using a solution of Cu(CF3COO)2, which was prepared by dissolution of 0.1 g of the copper salt in 30 ml of ethylene glycol. The silica plates used as substrates for deposition were immersed and withdrawn vertically in the solution and dried in air. The process was repeated sequentially 10 times for each sample. Ammonolysis of the films was performed at 310 °C/300 min or 300 °C/240 min. The film formation parameters are listed in Table 2.
Sample | Deposition conditions time/s; speed/rpm | Sample | Deposition conditions time/s; speed/rpm |
---|---|---|---|
A | 10; 500 | J | 30; 3000 |
B | 120; 2000 | K | 60; 4000 |
C | 30; 2000 | L | 120; 4000 |
D | 60; 3000 | M | 180; 5000 |
E | 30; 4000 | N | 180; 3000 |
F | 60; 5000 | O | 10; 4000 |
G | 300; 5000 | P | Nebulisation |
H | 10; 5000 | R | Dip-coating |
I | 30; 1000 |
Bulk powder products were characterized by PXD using Philips XPERT Pro θ–2θ and Bruker D8 diffractometers with CuKα1 and CuKα radiation, respectively. Phase identification was performed by search-match procedures with access to the ICDD powder diffraction file (PDF) and by comparison to patterns generated from ICSD data using PowderCell v.2.3.34 Structure refinement was performed using the GSAS-II program package,35 (data were collected from 10 ≤ 2θ/° ≤ 110, with a step size of 0.0084° 2θ and at a scanning rate of 0.02° min−1). Scanning electron microscopy (SEM) studies were performed with three instruments: (1) a LEO 1430 VP microscope (Cambridge Ltd) equipped with a Quantax 200 spectrometer (XFlash 4010 detector, Bruker AXS) for energy dispersive X-ray (EDX) spectroscopy (HV mode, SE, EHT = 10–20 kV, beam current 100 μA); (2) a Philips XL 30 environmental (E)SEM equipped with an Oxford Instruments INCA Energy 250 EDX system (EHT = 20 kV, spot size 5) and (3) a Quanta 3D FEG (EHT = 30 kV) instrument. Samples of powders and films deposited onto Si were placed onto carbon tabs attached to aluminium SEM stubs. All samples were analysed in the microscope without coating treatment. Atomic Force Microscopy (AFM) analysis of films was performed using a Veeco microscope (Digital Instruments) with an NSG-11 probe (scan size 2–10 μm; scan rate 1 Hz, tapping mode).
The IR spectra (including diffuse reflectance spectra; DRIFTS) of precursors, powder products and films were obtained using a Perkin-Elmer 2000 FT IR spectrometer. Raman spectra of copper nitride were collected at room temperature using a Horiba LabRAM HR confocal microscope system with a 532 nm green laser. Diffuse reflectance (DR) UV-Vis spectra (using a Varian Cary 500 Spectrophotometer) were used to measure the optical band-gap energy of powder samples. Absorption was measured over wavelengths from 300–2000 nm.
Additionally, in situ FTIR studies (using a Mattson-Genesis II spectrometer) were performed of the heterogeneous reactions of Cu(CF3COO)2 films loaded on mica and exposed to an NH3 atmosphere. The composition of the gas phase in contact with the sample was also monitored by FTIR. Single beam spectra with only gases in the beam and spectra with both the sample and gases in the beam were taken. The ratio of these spectra allows the gaseous absorption to be subtracted, giving the absorbance due to modification of the Cu(CF3COO)2 film. Additionally, the attenuated total reflectance (ATR) technique (using a SPECAC Silver Gate with Ge crystal) was employed to characterise the final product of the ammonolysis.
The thermal behaviour of copper nitride powders was investigated by thermogravimetric-differential thermal analysis (TG-DTA) under a flowing argon atmosphere using a Netzsch STA 409PC TG-DTA instrument coupled to evolved gas analysis by MS (Hiden HPR20 mass spectrometer). Samples were heated from 30–500 °C at a heating rate of 5 °C min−1 and maintained at this temperature for 2 h. The surface areas of the synthesized materials were determined by applying the BET method to nitrogen adsorption–desorption data, which were collected at liquid nitrogen temperature using a Micromeritics Gemini instrument.
According to the literature, the new band could be assigned to a CNN stretch.37 By 310 °C, the band at 2050 cm−1 is no longer present and the only feature in the spectrum is the band attributable to Cu3N (650 cm−1, Fig. 1 inset). Near-identical IR spectra were obtained for samples 3–6.
Significantly, the powder X-ray diffraction patterns of 1 and 2 contained no Bragg peaks and hence did not reveal any crystalline phases. In contrast, powder patterns obtained for samples 3–6 clearly demonstrate the presence of Cu3N (Fig. 2 and Fig. S3, ESI†). In the case of thin films deposited on mica, copper nitride reflections dominate with some traces of metallic copper also observed (Fig. S4 and S5, ESI†). The Raman spectra of 3–6 reveal peaks at 275 and 610 cm−1. According to the literature, the two bands at 220 and 634 cm−1 are indicative of copper nitride,38 corroborating the results above from FTIR spectroscopy. Thermogravimetric-differential thermal analysis (TG-DTA) performed for 3 under flowing argon demonstrates that the sample is thermally stable up to 349 °C. Above this temperature the product starts to decompose to Cu and N2 (as indicated by the MS spectrum of the evolved gas). This process corresponds to a mass loss of 7.0% (cf. the theoretical nitrogen content of 6.8 wt%).
![]() | ||
Fig. 2 X-ray diffraction patterns of (a) 3 (prepared at 300 °C, 240 min) and (b) 6 (350 °C, 240 min). |
SEM/EDX analyses were used to investigate the morphology and elemental composition of materials produced under different conditions. Samples 1 and 2 took the form of a dense mass or cake of agglomerated powders (Fig. 3a). EDX spectra yielded elemental compositions with Cu:
N
:
F ratios of 1
:
0.4
:
0.6 (RSD [%] Cu
:
N
:
F = 3
:
19
:
15) and 1
:
1.8
:
0.1 (RSD [%] Cu
:
N
:
F = 3
:
16
:
33) for 1 and 2 respectively. The elemental ratios can be rationalized in terms of the progress of the ammonolysis reaction. In the initial stages of the reaction, NH3 partially reacts with the precursor to induce formation of carbon–nitrogen bonds. Although 1 and 2 are X-ray amorphous, these bonds are visible as bands in the IR spectra. Given the relatively high nitrogen content of sample 2, we can assume that the temperature has a major impact on the conversion process (regardless of the reduced reaction time compared to 1). Volatile species are likely formed during ammonolysis at higher reaction temperatures, finally resulting in the reduction to elemental copper (samples 5 and 6) (as indicated by PXD in Fig. 2). Complete conversion to Cu3N without further reduction was observed for samples 3 and 4 and EDX analysis of 3 yielded a Cu
:
N ratio of ca. 2.8
:
1 (RSD [%] Cu
:
N = 3
:
7). Moreover, SEM micrographs demonstrated that 3 and 4 form as a porous matrix of sub-micron sized particles. Each faceted particle is of the order of 200–500 nm in diameter (Fig. 3b).
Nitrogen adsorption–desorption isotherms of sample 3 could be classified as type II, which represent nonporous solids (Fig. S3, ESI†).53 The adsorption isotherm is essentially linear in the range of P/P0 = 0–0.7 and condensation adsorption emerges in the region from P/P0 ∼ 0.8 to 1.0. The specific surface area of the sample is relatively low at 3.34 m2 g−1. The total pore volume is ∼0.038692 cm3 g−1 and reinforces the premise that most of the surface area of the sample is external and that the majority of structural nitrogen species are located in the bulk (as lattice N atoms) rather than on the (internal or external) surface of the material.54
Radiation | X-ray |
Instrument | D8 Bruker Advance diffractometer |
Temperature/K | 293 |
Formula, Z | Cu3N, 1 |
Crystal system, space group | Cubic, Pm![]() |
Lattice parameter, a/Å | 3.7543(3) |
Cell volume, V/Å3 | 52.917(4) |
No of observations, parameters | 10![]() |
R wp/% | 3.12 |
χ 2 | 1.29 |
As might be expected, variations in the spin coating parameters have a substantial impact on the deposited surface. Irregular randomly distributed aggregates, of a few millimetres in size, are visible at speeds of 500 and 1000 rpm. At higher speeds the distribution of the material is much more regular. EDX results confirm that samples E, G and L deposited and heated under ammonia at 300 and 310 °C contain copper. Nitrogen was present substantially in areas of the film where the coverage was continuous and deposition thickness greatest. These results might suggest that a proportion of deposited copper nitride had decomposed under these conditions and improvements to the compositional homogeneity might be achieved by ammonolysis of the films at lower temperatures (compared to bulk powders). However, we note also that in the case of very thin well-dispersed coatings, the EDX detection limit does not permit unequivocal quantitative identification of light elements such as nitrogen. Indeed, the characteristic sharp band at ca. 660 cm−1 in DRIFT spectra measured from these films strongly corroborates the presence of copper nitride (ESI,† Fig. S6).
The surface morphology and the distribution of the grains after ammonolysis were also investigated by AFM. Fig. 7a shows the AFM image of a spin-coated film of B deposited from the trifluoroacetate solution and annealed under flowing NH3 at 300 °C for 4 h. There are two types of distinct particles; small particles are under 50 nm across with a height of ca. 10 nm while larger particles form with diverse diameters varying from 150–300 nm and heights between 70–100 nm. Both types of particle are evenly distributed across the surface of the plate.
![]() | ||
Fig. 7 AFM images of material deposited on to Si substrates and ammonolysed: (a) from spin coating (sample B); (b) via nebulisation (sample P). |
The topography of the surface fabricated via nebulisation (sample P, Fig. 7b) is different from the spin-coated samples. By comparison to the spin coated sample, the coverage of the substrate was more complete but islands rather than a continuous film remained. Individual grains exhibited comparable sizes (50–100 nm across) to those observed in spin coated samples. Additionally, we examined the preparation of Cu3N films by dipping silicon plate substrates in ethylene glycol solutions followed by ammonolysis reactions at 300 °C (Fig. 8). As for spin coated and nebulized samples, the films have non-uniform distributions and only partially cover the silicon plates. This results in areas across the substrate with different concentrations of the deposited material. The most common observed topography is shown in Fig. 8a. In this case, EDX analysis produced no convincing evidence for nitrogen in these films. Similar elemental analysis results were recorded for areas containing more densely packed material (Fig. 8b). By contrast, the presence of nitrogen was confirmed in the areas of films that were the most uniform in coverage (consisting of fine grains of average size about 300 nm; Fig. 8c).
![]() | ||
Fig. 8 Representative SEM images of the dip-coated sample (R) after heating under ammonia, showing: (a) the predominant form of the deposited layer and (b), (c) specific areas of the film. |
Deposition and ammonolysis experiments suggest therefore that future studies should focus on optimizing processing methods to improve the quality and homogeneity of the films. Moreover, results suggest that the ammonolysis of nanostructured films deposited onto silicon may require milder conditions (e.g. lower temperature) than the equivalent process for bulk powders.
To the best of our knowledge, there are no previously published studies concerning fabrication of Cu3N films by chemical deposition methods. In fact, so-called “wet chemistry methods” have been utilised relatively rarely for preparation of any nitride films. Among previous examples are the formation of silicon nitride films using a sol–gel process combined with dip-coating57 and the preparation of smooth, crack-free boron nitride films by spin coating.58 In this latter case, the nitride film was obtained by spinning a polyborazine precursor onto a substrate, followed by pyrolysis.
Application of solution methods to prepare metal nitride thin films are sparse.59 Noteworthy, is a report by Luo et al. describing the polymer-assisted deposition (PAD) of a series of metal-nitride layers such as TiN, AlN, GaN and NbN.60,61 In the PAD process, the polymer not only controls the viscosity of the metal–polymer solution but can also bind the metal ions often facilitating a homogenous distribution of the precursor. From our own experimental data and from those in the literature, it can be presumed that the selection of solvent (solutions) plays an important role in the deposition and can have a positive impact on enhanced film uniformity. Pinholes such as those observed in our experiments usually indicate a local de-wetting and defects such as pinholes and “islands” were also observed for films produced by the PAD process.62 Hence, although both results herein and by PAD suggest that near-uniform layers can be deposited, optimisation of these processes seems to be the most important task towards achieving defect-free films. The previous studies and the work described herein should act as an incentive to researchers to continue to expend effort in developing relatively inexpensive and easy chemical methods for deposition of nanostructured nitride films.
Footnote |
† Electronic supplementary information (ESI) available. See DOI: 10.1039/c6tc00493h |
This journal is © The Royal Society of Chemistry 2016 |