Örjan
Danielsson
*,
Xun
Li
,
Lars
Ojamäe
,
Erik
Janzén
,
Henrik
Pedersen
and
Urban
Forsberg
Department of Physics, Chemistry and Biology, Linköping University, SE-581 83 Linköping, Sweden. E-mail: orjan.danielsson@liu.se
First published on 22nd December 2015
Semi-insulating buffer layers are utilized to prevent leakage currents in Gallium Nitride (GaN) high power semiconductor devices. To make the GaN material semi-insulating, it can be doped with carbon. Carbon is inherently present in the process for producing GaN thin films by chemical vapor deposition (CVD), through the use of trimethyl gallium (TMGa) as a precursor. TMGa decomposes in the gas phase, releasing its methyl groups, which act as a carbon source for doping. It is previously known that carbon doping levels can be controlled by tuning CVD process parameters, such as temperature, pressure and precursor flow rates. However, the mechanism for carbon incorporation from TMGa is not yet understood. In this paper, a reactor independent model for predicting carbon incorporation from TMGa in GaN layers grown by CVD is proposed. The model is based on ab initio quantum chemical calculations of molecular adsorption and reaction energies. Computational Fluid Dynamics, including a chemical kinetic model for the decomposition of the precursors and reactions in the gas phase, is used to calculate gas mixture composition under realistic process conditions. These results are used together with the proposed model to obtain carbon doping concentrations as well as growth rates, varying inlet NH3/TMGa ratios (157–625) and temperature (800–1100 °C). The model predictions are then correlated with measurements with good agreement. It is concluded that the contribution of gallium to the GaN layer shifts from GaCH3 at low temperatures to atomic Ga at higher temperatures. In the same way there is a shift in carbon doping contribution, from CH3 at low temperatures to C2Hx at higher temperatures.
A crucial aspect in the realization of GaN based devices is the possibility to synthesize thin layers of these materials uniformly over large areas. The most common approach to achieve this with controlled thicknesses is to use chemical vapor deposition (CVD), which is a process where the layers are formed through surface chemical reactions between molecules containing the atoms needed for the target film, in this case nitrogen and aluminum, gallium or indium. The standard chemical route for CVD of the group 13 nitrides is to use trimethyl-metal complexes (M(CH3)3, where M = Al, Ga or In) in combination with ammonia (NH3). Even though CVD of GaN can be regarded as a mature synthesis route for GaN films, the mechanisms for incorporation of impurities into the material is still very much unknown. Understanding and controlling impurity incorporation is of highest importance in order to further advance the development of semiconductor technology based on the group 13 nitrides.
One of the most important and common impurities in GaN is carbon, which can be utilized to obtain a semi-insulating material1,2 but also acts as a p-type dopant.3 Carbon is inherently present in CVD of GaN from the use of trimethyl gallium (TMGa) as a precursor.4 It can be noted that the main alternative to TMGa is triethyl gallium (TEGa) which will also form hydrocarbon species in the gas phase.5 The carbon free precursors GaCl and GaCl3 are generally avoided in CVD of GaN as their use may lead to the formation of solid particles of NH4Cl, which will destroy the GaN layers. Also, high amounts of solid NH4Cl downstream from the reaction cell will badly affect the vacuum system and pumps.
At the temperatures used for GaN CVD, 600–1100 °C, TMGa decomposes in the gas phase releasing its methyl groups; however the mechanism for the incorporation of carbon from TMGa is not yet understood. It is tempting to think that a released CH3 will be very reactive towards the GaN surface, but it must then be remembered that GaN CVD is done in a mixture of hydrogen and nitrogen in which the TMGa is diluted on the order of 1000 times and that the methyl groups released in the gas phase therefore likely will react with hydrogen to form methane, which is very unreactive due to its high symmetry. It is known experimentally that the carbon content in the GaN layers can be controlled to some degree by varying process conditions such as temperature, NH3/TMGa ratio and pressure.4,6,7 However, changing process parameters to control impurity incorporation may lead to non-optimal conditions for the actual GaN growth, which in turn may lead to layers with rough morphology or bad thickness and doping uniformity. Separate carbon precursors have therefore been suggested for applications where a controlled amount of carbon is desired in the layers.8 For applications where essentially carbon free GaN is desired an alternative Ga precursor is most likely needed. From a better understanding of how carbon from the Ga precursor is incorporated into GaN, new precursors can be designed that may still contain carbon atoms in the ligands but with ligands designed to give a precursor decomposition that may lead to significantly lower carbon incorporation.
In this paper we use thermochemical and quantum chemical modelling of the gas phase and surface chemistry, respectively, to form a better understanding of the CVD chemistry of GaN. Our modelling is then combined with the experimental results of carbon incorporation into GaN CVD to propose an empirical model for the carbon incorporation chemistry in GaN CVD layers.
Since we are using CFD, the whole CVD reactor could, in principle, be modeled and used in the simulations. However, the complex design of the real CVD reactor would lead to very time consuming simulations only for solving the flow inside the chamber. Adding heat and chemical models increase the complexity even further. Alternatively, several simplifications would be needed which inevitably introduce large uncertainties in the results. Also, process parameters and conditions differ between different reactor designs and the purpose here is not to develop a model adapted to a specific reactor setup, but rather to study the fundamentals of carbon incorporation into GaN. Therefore a more general reactor geometry is chosen here. A so-called plug flow reactor24 was used as the model geometry for the simulations. In this type of reactor the flow profile is completely flat (a ‘plug’), which together with imposed isothermal conditions makes the axial distance of the reactor equal to a time coordinate of the reacting system. The results from the CFD simulations could then be analyzed at a time corresponding to the residence time of the gas in the real CVD reactor. In the study this time was set to 0.6 s, estimated from a more detailed CFD simulation of the CVD system used for the experimental part.
The GaN (0001) surface was simulated by a cluster model, cut out from the crystal structure,30 that consisted of 24 Ga and 24 N atoms forming two GaN layers perpendicular to the [0001] direction (a cluster size that was also studied in ref. 28). Dangling bonds at all surface planes were saturated by capping H atoms, which is a reasonable assumption under H-rich atmosphere CVD conditions. When studying a chemisorbed adsorbate one or two capping H at the center part of the (0001) surface were replaced by the adsorbate in an appropriate adsorption mode. The energy-minimum structures of the clusters were obtained by geometry optimizations31 and the enthalpies and Gibbs free energies at 1300 K for the optimized geometries were obtained from vibrational normal-coordinate calculations32 as described in ref. 33 using the Gaussian09 program. All atoms were allowed to relax in the geometry optimizations. When one H vacancy was present at the otherwise H-saturated GaN cluster the spin state was a doublet state, whereas for two H vacancies the triplet state was the state lowest in energy. In case the adsorbate was in a doublet spin state (e.g. CH3) the dangling bond on the GaN cluster would be saturated so that a singlet state was formed, etc. The lowest-energy state of an isolated Ga atom was a doublet and that of the GaCH3 molecule a singlet.
For computational convenience, in the identification of transition states and computation of activation energies involving H, Ga and GaCH3 a smaller GaN cluster was used, which consisted of merely 4 GaN units. The numerical values of the activation energies obtained from these small cluster studies will be very approximate, but we consider them as initial guesses that can be further refined by comparison with experiment. The molecular geometries of the large and the small clusters can be seen in Fig. 1. For the molecules containing two C atoms the activation energies were obtained from the energy profiles when the molecule in a symmetric fashion approached two surface H vacancies at the larger GaN cluster.
In the following, adsorption reaction energies are given in the tables for reactions at a surface where the appropriate number of H vacancies are already present. The reaction energy for removing one H atom from the H-saturated (GaN)24 cluster is 459 kJ mol−1 and the reaction free energy is 272 kJ mol−1 (the corresponding values for removing two H atoms from the same cluster are 918 kJ mol−1 and 554 kJ mol−1).
![]() | (1) |
A common way to describe the surface reaction rate is
![]() | (2) |
To study carbon incorporation from TMGa, GaN layers were grown where either temperature or the growth rate was varied during the deposition to produce multiple layers under different CVD conditions and thereby obtaining different carbon concentrations in each layer. The thickness of the individual layers was approximately 200 nm. The growth temperature was varied from 800 °C to 1050 °C at a constant NH3 flow rate, with a NH3/N2 ratio of 2/3, and a TMGa flow giving a NH3/TMGa = 625. The growth rate was varied at a constant temperature of 1050 °C by changing the TMGa flow rate while keeping the NH3 flow constant, giving NH3/TMGa = 157–625.
The multilayers were analyzed by secondary ion mass spectrometry (SIMS), using Cs+ as primary ions, to obtain the impurity concentrations. The detection limit for carbon in these specific measurements was 1–2 × 1016 cm−3. All of the SIMS measurements were performed on the center part of the samples.
As pointed out in Section 2.2, adsorption is assumed to take place on a hydrogen terminated surface where one or two “free sites” (i.e. a surface site without the terminating hydrogen atom/atoms) are available for the adsorbing species. Thus, the reaction energies calculated here does not include the removal of surface H. The reaction energies to create a single “free” surface site is 459 kJ mol−1, and two adjacent “free” surface sites is 918 kJ mol−1, respectively.
Atomic Ga adsorbs without activation energy, and the reaction free energy is calculated to be −304 kJ mol−1. GaCH3 can adsorb either with its Ga atom or with the methyl group at a single adsorption site (Reactions (2) and (4) in Table 1). In the first case GaCH3 adsorbs with its Ga atom to a free surface site without activation energy, while keeping its bond to the methyl group. To break the Ga–CH3 bond when the molecule has adsorbed in this way requires about 147 kJ mol−1, as obtained from the calculations, which means that very few of these bonds actually will break at the temperatures used here.
Surface reaction | Reaction probability, γ | Activation energy, Ea (kJ mol−1) | Reaction free energy, ΔrG0 (kJ mol−1) | |
---|---|---|---|---|
Growth | ||||
1. | Ga(g) → Ga(ads) | 0.135 | 0 | −304 |
Growth and carbon adsorption | ||||
2. | GaCH3(g) → GaCH3(ads) | 0.135 | 0 | −112 |
Carbon adsorption | ||||
3. | CH3(g) → CH3(ads) | 0.135 | 0 | −117 |
4. | CH3Ga(g) → CH3(ads) + Ga(g) | 0.135 | 35 | −3.0 |
5. | C2H2(g) → C2H2(ads) | 0.002 | 38 | −270 |
6. | C2H4(g) → C2H4(ads) | 0.002 | 28 | −171 |
In the second case, when GaCH3 approaches the surface with the methyl group first, the Ga–CH3 bond will break as the bond between the methyl group and the surface is established (Reaction (4)).
Similarly, C2H6 could react with the surface in the same way (i.e. with one of its CH3’s approaching the surface, while breaking off the other CH3 group). This reaction however, has a positive reaction free energy which indicates that the reaction is disfavored, and the activation energy is relatively large, 188 kJ mol−1.
There is also a possibility that GaCH3 adsorbs on two adjacent sites (adsorbing with both its Ga and C atom at the same time). This reaction is energetically favored (reaction free energy of −307 kJ mol−1), assuming there are two adjacent sites available. However, the probability that the molecule actually finds two adjacent vacancies is considered much smaller than the probability that it will find one single vacancy, and thus the contribution from this type of adsorption should be small in comparison to the other two options.
Free methyl radicals are also present in the gas phase for the whole temperature range studied here. The reaction free energy for CH3 adsorption (Reaction (3)) is similar to that of GaCH3 adsorption (Reaction (2)), and the activation energy is taken to be close to zero considering the highly reactive nature of the methyl radical.
At the higher temperatures C2H2, C2H4 and C2H6 have high enough partial pressures in the gas phase to possibly make a significant contribution to carbon doping. It is assumed that these species will contribute with both their carbon atoms to doping if they adsorb. Adsorption will thus take place when there are two adjacent free sites available. For C2H2 and C2H4 the reaction free energies are −270 kJ mol−1 and −174 kJ mol−1, respectively, and the activation energies are 38 kJ mol−1 and 28 kJ mol−1. When C2H6 approaches the surface the calculations show that the free sites at the surface will “steal” two of the hydrogen atoms from the molecule, resulting in a fully hydrogen terminated surface, and no carbon incorporation will take place.
The Gibbs free energies and activation energies for the reactions chosen to be relevant in the present study are presented in Table 1. The values of the reaction probabilities in Table 1 are further explained in Section 4.
Temperature (°C) | 800 | 900 | 1000 | 1030 | 1050 |
---|---|---|---|---|---|
Carbon concentration (cm−3) | 1.2 × 1020 | 4.3 × 1019 | 1.9 × 1017 | 6.1 × 1016 | 3.0 × 1016 |
Growth rate (μm h−1) | 0.65 | 0.80 | 0.99 | 1.12 | 1.18 |
NH3/TMGa ratio | 625 | 418 | 314 | 251 | 209 | 179 | 157 |
---|---|---|---|---|---|---|---|
Carbon conc. (cm−3) | 6.0 × 1016 | 8.1 × 1016 | 1.2 × 1017 | 1.7 × 1017 | 2.4 × 1017 | 3.3 × 1017 | 4.0 × 1017 |
Growth rate (μm h−1) | 1.29 | 1.32 | 1.83 | 2.38 | 2.82 | 3.17 | 3.99 |
Thus, the growth rate, Ṙg, is calculated by
![]() | (3) |
![]() | ||
Fig. 4 Calculated (–■–) and measured (--●--) growth rates when varying the inlet NH3/TMGa ratio at constant NH3 flow (2000 sccm). Process temperature is 1050 °C. |
![]() | ||
Fig. 5 Calculated (–■–) and measured (--●--) growth rates when varying the process temperature. NH3/TMGa ratio = 625. |
The model predicts a change in relative contribution to the growth from GaCH3 and atomic Ga, respectively, with temperature. The relative contribution from GaCH3 changes from 99.1% at 800 °C to 27.8% at 1050 °C. This change could be one explanation to the improved morphology and structural quality obtained at higher temperatures, as CH3 has been suggested to degrade both these properties of GaN epitaxial layers.8
![]() | (4) |
![]() | (5) |
![]() | (6) |
When examining the measured doping variation with temperature it is observed that there is a large drop in doping concentration of two orders of magnitude between 900 °C and 1000 °C (see Table 2). Looking at the simulated concentrations of different carbon containing species in the gas phase we find no obvious reason for this large drop. It is further observed that if all carbon atoms that follow Ga to the surface via GaCH3 would be incorporated into the material, the doping level would be at least two orders of magnitude too high in the lower part of the temperature range, and about 5 orders of magnitude too high at the higher temperatures. Fig. S6 in the ESI† shows the contribution from the different molecules vs. temperature. These results strongly suggest that there must be an efficient mechanism that removes carbon from the surface before it is incorporated into the material. This is consistent with previous findings.4,35 In the literature some mechanisms have been suggested for the removal of carbon from the GaN surface, such as a rehydrogenation process where atomic hydrogen reacts with carbon at the surface, and then desorb as methyl or methane, or blocking of surface sites by H atoms. Lam et al. estimated the activation energy for direct desorption of methyl radicals from the GaN surface to be about 171 kJ mol−1.36 They also found that significant amounts of methane may be produced from reactions involving adsorbed methyl and hydrogen atoms. Koleske et al. estimated an activation energy of about 154 kJ mol−1 for the carbon removal at temperatures between 650 °C and 1100 °C.4
Assuming the gas phase reaction mechanism we have used here is correct, it is mainly carbon coming from GaCH3 and CH3 that should be removed (or not adsorbed at all) for the modeling results to agree with experimental data. When calculating reaction energies for four possible reactions for the removal of adsorbed methyl (Table 4) it can be seen that all of them are exothermic and therefore energetically favored. It can also be concluded that the removal of the CH3 group from adsorbed GaCH3 with the aid of atomic H or CH3 (reactions (7) and (8)) in the gas phase is much more favorable than the corresponding removal of adsorbed CH3 from the surface (reactions (9) and (10)).
Removal of methyl groups | Reaction energy, ΔE (kJ mol−1) | |
---|---|---|
7. | GaCH3(ads) + H(g) → Ga(ads) + CH4(g) | −328 |
8. | GaCH3(ads) + CH3(g) → Ga(ads) + C2H6(g) | −255 |
9. | CH3(ads) + H(g) → CH4(g) | −80 |
10. | CH3(ads) + CH3(g) → C2H6(g) | −6 |
We have here listed some of the more likely reaction steps for removing CH3 from the surface of the growing GaN crystal. However, we believe that the process is more complex than this, but it is beyond the scope of this paper to go any further in the surface reaction modeling at this point. Instead we assume that we could describe the removal of methyl with one single reaction step, where the reaction rate is given by an Arrhenius expression. By analyzing how many of the methyl groups that needs to be removed, for the modeling results to agree with experimental findings, we find that this single reaction step should have an activation energy of 0.26 kJ mol−1. If we on the other hand would assume that every CH3 in the GaCH3 molecules that adsorb immediately are removed, as soon as adsorption has taken place (e.g. with the aid of H or gaseous CH3 reactions (7) and (8)), then some of the remaining CH3’s must still be removed. The activation energy for removing these remaining methyls should then be 9.49 kJ mol−1, to match the model with experiments. The assumption that all of the CH3’s in the adsorbed GaCH3 are removed could be motivated by the relatively low reaction energies for those reactions.
Adding either of these two desorption reaction mechanisms to the model greatly improves the model’s agreement with experimental data. It is also noted that with this desorption mechanism included, all of the CH3’s will be removed at temperatures above 950 °C under the conditions we use. At higher temperatures (>950 °C) the doping concentration levels are well predicted taking only C2H2 and C2H4 into account as carbon contributors. For the reactions involving C2H2 and C2H4, a value of γ = 0.002 was used. The value was determined by trial-and-error to achieve a good agreement with experimental data when varying the NH3/TMGa inlet ratio, but it seems to give good results also when the temperature varies between 1000 °C–1100 °C. The C2H2 and C2H4 molecules adsorb on two surface sites simultaneously, and it would be safe to assume that the probability to find two adjacent free surface sites is much less than finding a single site. Thus, the value of γ seems reasonable.
Calculated and measured doping concentrations are compared in Fig. 6 and 7 below.
![]() | ||
Fig. 6 Calculated (–■–) and measured (--●--) carbon doping concentrations when varying the NH3/TMGa ratio at constant NH3 flow (2000 sccm) and T = 1050 °C. |
![]() | ||
Fig. 7 Calculated (–■–) and measured (--●--) carbon doping concentrations when varying the process temperature. NH3/TMGa ratio = 625. |
At higher temperatures, C2H2 and C2H4 are the main species contributing to the carbon doping. This is the result of increased production rates of these molecules in the gas, and the fact that CH3 is removed completely from the GaN surface at higher temperatures, using the assumptions made in the model. With our model, the change in carbon doping concentrations with varying TMGa inlet concentrations and with varying temperatures is well predicted. It should be noted that if CH3 would not be removed completely at the higher temperatures, the prediction of the variation in carbon doping concentration with TMGa inlet concentration would not be as accurate as is obtained now. Thus, we can conclude that there is a relatively rapid switch at about 1000 °C, from CH3 to C2Hx as the most important carbon source.
It should also be noted that to obtain high crystalline quality of the GaN layers, the optimal growth temperature is above 1000 °C, and that lower temperatures often yield layers with high dislocation densities. This agrees well with our findings here, since it has been suggested by others that high amounts of CH3 could degrade the GaN morphology and structural quality.
The contribution of gallium to the GaN layer shifts from GaCH3 at low temperatures to pure Ga at higher temperatures. In the same way there is a shift in carbon contribution, from CH3 at low temperatures to C2Hx at higher temperatures.
Footnote |
† Electronic supplementary information (ESI) available. See DOI: 10.1039/c5tc03989d |
This journal is © The Royal Society of Chemistry 2016 |