0) sapphire grown by rf-molecular beam epitaxy
T. C. Shibin Krishna†
a,
Neha Aggarwal†a,
G. Anurag Reddy†a,
Palak Dugara,
Monu Mishra†a,
Lalit Goswamia,
Nita Dilawarb,
Mahesh Kumara,
K. K. Mauryac and
Govind Gupta†*a
aPhysics of Energy Harvesting Division, CSIR-National Physical Laboratory, Dr K. S. Krishnan Road, New Delhi-110012, India. E-mail: govind@nplindia.org; Fax: +91-11-4560-9310; Tel: +91-11-45608403
bApex Level Standards & Industrial Metrology, CSIR-National Physical Laboratory, Dr K. S. Krishnan Road, New Delhi-110012, India
cSophisticated and Analytical Instrumentation, CSIR-National Physical Laboratory, Dr K. S. Krishnan Road, New Delhi-110012, India
First published on 24th August 2015
A systematic study has been performed to correlate structural, optical and electrical properties with defect states in the GaN films grown on a-plane (11
0) sapphire substrate via rf-plasma molecular beam epitaxy. Morphological analysis reveals the presence of small lateral size (30–70 nm) hexagonally shaped V-pits on the GaN films. These V-defects possibly contribute as the main source of non-radiative decay. High resolution X-ray diffraction reveals highly single crystalline GaN film grown on a-plane sapphire substrate where the threading dislocations are the cause of V-defects in the film. Photoluminescence measurement shows a highly luminescence band to band emission of GaN film at 3.41 eV along with a broad defect band emission centered at 2.2 eV. A detailed optical and electrical analysis has been carried out to study the defect states and related carrier dynamics for determining the efficacy of the film for device fabrication. The variation in the low temperature current voltage measurements confirms the presence of deep level defects in the mid-band gap region while transient spectroscopy shows that non radiative decay is the dominant relaxation mechanism for the photo excited-carriers from these defect states.
0] sapphire and [1
00] GaN parallel to [1
00] sapphire respectively.5 Lower lattice mismatch will lead to the growth of GaN with better crystalline quality, lesser defects and hence better devices. Moustakas et al. have shown that GaN films grown on a-plane sapphire with initial nitridation and low temperature GaN buffer layers lead to smooth surface morphology compared to those grown on c-plane sapphire.6,7 In addition to smooth surface morphology and crystalline quality which are prerequisite for device-competent semiconductor material, it is also imperative that we take into account the influence of trap states, centers for radiative and non-radiative recombinations in the material. There have also been some studies on the effect of GaN and AlN buffer layers on the growth of GaN on a-plane sapphire.8 Few groups have reported a comparative study on the performance of InGaN/AlGaN multiple quantum well LEDs grown on a-plane and c-plane sapphire substrates.9,10 It was found that LEDs grown on a-plane sapphire substrates showed superior optoelectronic and crystalline properties as compared to the ones grown under identical conditions on c-plane sapphire substrates: decreased X-ray diffraction line width, reduced pit density, and smaller ideality factor. However, there has not been any extensive study of GaN grown on a-plane sapphire substrate from the point of view of device fabrication. Thus, it is important to investigate the structural and optical properties of GaN film grown on a-plane sapphire substrate which can lead to the development of comprehensive understanding into the high quality epitaxially grown GaN film.
In the present work, we have demonstrated highly crystalline quality of the epitaxially grown GaN film on a-plane sapphire substrate and the structural and optical properties have been studied and explored in detail. Additionally, from the perspective of device fabrication, the influence of defects on device performance should be considered too. Therefore, the generated defects states and related dynamics are explored and incorporated through I–V and transient spectroscopy.
0) sapphire substrate was carried out using RIBER Compact 21 PAMBE system equipped with standard Riber Pyrolytic Boron Nitride (PBN) effusion cells and a plasma source (ADDON RF-plasma source) to supply active nitrogen (N*) species. The a-plane sapphire substrate was chemically pre-cleaned by using the standard cleaning procedure followed by out-gassing in the buffer chamber at 600 °C. Nitridation of substrate was performed at low substrate temperature (450 °C). A LT-GaN buffer layer was deposited at 530 °C under Ga-rich conditions. The epitaxial GaN film was grown for 150 minutes at rf plasma power of 500 W which has a growth rate of 3 nm min−1 (Ga beam equivalent pressure (BEP) of 9 × 10−7 Torr) at 735 °C. Fig. 1(a) shows the schematic cross sectional view of grown layers on a-plane sapphire substrate. The growth was monitored in situ by reflection high energy electron diffraction (RHEED) using STAIB electron gun (12 keV) to ensure high quality two-dimensional (2D) growth. The growth temperature was monitored by optical pyrometer (error value of ±5 °C) calibrated with thermocouple.
0) sapphire, which is consistent with our experimental RHEED observations described below. In Fig. 1(b), the top monolayer of “O” atoms in sapphire have been replaced by “N” atoms. It is known that the sapphire lattice is terminated by oxygen atoms at the surface.11 This presence of oxygen species at the interface can complicate the epitaxy of GaN, by formation of Ga–O layer at the interface hence the a-plane sapphire is exposed to nitrogen plasma resulting in the replacement of all the O atoms on the surface by N atoms, thereby forming a monolayer of strained AlN. This facilitates the subsequent growth of GaN on a better chemically matched substrate.
The RHEED pattern observed for GaN along (11
0) and (1
00) zone axes are shown in Fig. 1(c and d). The sharp streaky typical 1 × 1 reconstructed RHEED pattern of GaN film has been observed. The kikuchi diffraction pattern observed along (11
0) direction illustrates the two-dimensional (2D) growth of GaN epitaxial film with high crystalline quality. The camera length of the diffraction system was calculated and used to estimate the interplanar spacing of the planes responsible for the pattern. Based on these calculations, it was confirmed that GaN growth on a-plane sapphire has the epitaxial orientation relationship of (0001) GaN//(11
0) sapphire. Therefore, high crystalline quality wurtzite structure GaN film is grown epitaxially along c-direction on a-plane sapphire substrate.
The surface morphology of the grown GaN film was examined by using FESEM. Fig. 2(a) exhibits the large area FESEM image of the GaN film on a-plane sapphire substrate. The surface of the film was continuous and has hexagonal shaped pits with variable size distribution. Inset Fig. 2(a) shows zoomed area FESEM image to clearly visualize the pit shape & size. The average pits density was calculated to be 6.7 × 108 cm−2 and variation in the lateral size of the hexagonal shaped pits is found to be between 30 nm to 70 nm. These pits are in the form of V-defects on the GaN surface.12,13 The threading dislocations (TD) with different core energies14,15 are responsible for different sizes of V-defects on surface. The formation of V-pits could result from strain relaxation between GaN film and the substrate. A schematic representation of V-defects mediated hexagonal pits is shown in Fig. 2(b). These V defects have an open hexagonal, inverted pyramid with (10
1) and (1
01) are the adjacent hexagonal side walls.16 Many researchers have reported that for heteroepitaxy, there is always a TD connected with the bottom of V defect and the cause of V-defect formation is the increased strain energy.17,18 Recently Kim et al.19 reported the phenomenon included the correlation of carrier recombination and lateral V-defects size. Small lateral size of V-pits leads to lateral diffusion of carriers which suggests more non-radiative recombination domains. Hence, we propose that the small lateral size (30–70 nm) of the V-pits on the GaN film grown on a-plane sapphire could lead to large non-radiative recombination of carriers. The carrier dynamics relating to the presence of defect states and their recombinations are explored in detailed in subsequent section (transient spectroscopy analysis). Fig. 2(c) shows the cross sectional FESEM image of GaN/a-sapphire. A sharp heterostructure interface has been observed and the thickness was found to be 440 nm.
A more detailed structural analysis and study of crystalline quality of the grown film has been explained through HRXRD analysis. Fig. 3(a) shows a 2θ-ω scan of GaN film grown on a-plane sapphire substrate. The 2θ peak positions at 34.67° and 72.95° are attributed to diffraction along (0002) and (0004) plane of GaN respectively. The (0002) plane diffraction angle of heteroepitaxial GaN was close to that of strain free bulk GaN (34.57°)20 which might be due to the lattice relaxation of the GaN film grown on a less lattice mismatched (∼2% along c-direction) a-plane sapphire substrate. In addition, two sharp peaks at 2θ position of 37.9° and 80.85° are ascribed to (11
0) and (22
0) plane of diffraction from a-sapphire substrate. The apparent presence of first and second order X-ray diffractions of GaN in the 2θ-ω scan illustrates the highly crystalline GaN film grown along the c-direction epitaxially on a-plane sapphire substrate. The lattice constants in the growth direction (along c-axis) for GaN is calculated directly by using Bragg's law,
2dhkl sin θhkl = nλ
| (1) |
![]() | (2) |
![]() | ||
| Fig. 3 (a) HRXRD 2θ-ω scan of GaN film grown on a-plane sapphire (b) ω scan spectra from the symmetric (0002) and asymmetric (10–12) plane of diffraction of GaN film. | ||
Further, HRXRD analysis has been employed to procure the information of crystalline quality as well as dislocation densities in the GaN epitaxial layer. Fig. 3(b) shows the ω scan from the symmetric (0002) and asymmetric (10
2) plane of diffraction of GaN film having FWHM of 9.83 and 28.15 arcmin respectively. However, smaller FWHM value of symmetric scan (4 arcmin) was reported for thick (12 μm) GaN layer grown on a-plane sapphire by HVPE.22 The FWHM of the (0002) peak has been used to evaluate the screw or mixed TD densities while the (10–12) peak is used for calculating edge TD densities. The TD density can be quantified by the following equations,21
![]() | (3) |
![]() | (4) |
2) planes by HR-XRD rocking curves and b is the Burgers vector length (bscrew = 0.5185 nm, bedge = 0.3189 nm). The screw and mixed dislocation densities calculated from (0002) plane of reflection is 3.3 × 108 cm−2 while the edge dislocation densities evaluated from (10
2) plane is 7.0 × 109 cm−2. Therefore, these TDs are the cause of V-pits in the GaN film grown on a-plane sapphire substrate. A high value of TDs also points towards presence of non radiative recombination centres.23
As the GaN film is grown heteroepitaxially on a-plane sapphire, there will be stress generation due to difference in lattice constant of film and substrate. The developed stress in the grown GaN film is examined by Raman spectroscopy. The RT-Raman spectra is obtained in back-scattering configuration and the laser light is incident along the normal direction of the grown GaN film. Generally, E2 (high) and A1 (LO) are the only active phonon modes of GaN in this configuration at RT (Fig. 4). The shift in E2 (high) phonon mode is utilized to quantify the stress/strain present in the grown film.24 So, we prominently accentuate on the E2 (high) phonon mode peak which appeared at 569.8 cm−1 for the GaN film grown in this study. For stress-free GaN film, the E2 (high) mode should be visible at 567.6 cm−1.25 Thus, a blue shift of 2.2 cm−1 observed in the GaN film postulates that stress in the grown film is compressive in nature. Moreover, the peaks located at 735, 646 and 418 cm−1 belongs to the A1 (LO) phonon mode of GaN, Eg mode of sapphire and A1g mode of sapphire respectively. Further, the stress can be quantified by assuming a linear relationship between the E2 (high) Raman shift, Δω and the biaxial stress, σxx:
| Δω = Kσxx | (5) |
The detailed optical analysis of GaN film has been carried out to analyze the quality of the grown film. The room temperature PL spectrum of the grown GaN on a-plane sapphire substrate is shown in Fig. 5(a). It can be clearly seen that the radiative transition of excited electron from conduction band to valence band of GaN is at 3.41 eV. This illustrates the sharp luminescence peak of the GaN film grown on a-plane sapphire substrate where a blue shift of 10 meV was observed in near band-edge (NBE) emission with respect to strain-free GaN (3.4 eV).27 The diminutive blue shifted NBE emission value is competitive to the recently enunciated stress relaxed homo-epitaxial growth of GaN film.28 The shift in the NBE emission of GaN can be caused not only by strain but also strongly by Burstein Moss effect. The origin of shift in the NBE can be attributed to stress (0.52 GPa) present in the film, as obtained by Raman spectroscopy measurements. For an investigation of the defect generated bands in the band gap, the optical spectra in the region 1.7–2.8 eV has been deconvoluted (inset Fig. 5(a)) and explained. The deconvoluted spectra consist of three peaks at 2.1, 2.25 and 2.4 ± 0.05 eV which have been attributed to red luminescence (RL), yellow luminescence (YL) and green luminescence (GL) respectively. The defects related bands, like GL and RL bands are evident due to internal transitions to defects states in the GaN film by providing localized occupation to the carriers.29 The YL band arises due to the deep acceptor levels developed by gallium vacancy related defects in undoped GaN.30 A schematic representing the band diagram of the grown GaN film has been shown in Fig. 5(b) where the defect states and trajectory of an electron during recombination process are being depicted.
The preliminary characterisation of the epitaxial GaN film grown on a-plane sapphire substrate indicates that the film quality is appreciable. But there is a clear evidence of high density of defects related states in grown film. From the point of view of device fabrication and adopting an end to end approach, it became important to analyse how these defects states in the grown film and its influence on device performance. So the generated defects states and related recombination dynamics have been further characterised.
I–V measurements were performed at varying temperature on the sample and a plot was obtained between the current (I) vs. the applied bias (V) (shown in inset of Fig. 6). For all practical purpose, ignoring the series resistance, the current–voltage characteristics can be represented by the equation:
![]() | (6) |
![]() | (7) |
The temperature dependant R–V (Fig. 6) shows that there is drop in sample resistance after second voltage sweep. On consecutive voltage sweep from −6 volt to +6 volt and from +6 volt to −6 volt, we observe that the sample resistance has decreased. The magnitude of this phenomenon is found to be maximum at 0 volt bias. In lieu of reduction of sample resistance from approximately 13 kΩ during first voltage sweep to approximately 12 kΩ during second voltage sweep it could be inferred that this reduction in resistance i.e., increase in current conduction is direct consequence of presence of deep level defects in mid-band gap region.32 The presence of deep level defects bears an influence on the I–V characteristic with a reduced resistance at 0 voltage in consecutive voltage sweeps due to electrons tunnelling from the Schottky barrier to an interfacial state.33 The sample grown at 735 °C shows an improvement in its crystal quality than the sample grown at 730 °C [reported in ref. 33]. This can be deduced from the improved current–voltage curve. The decrement in resistance in consecutive voltage sweeps is itself reduced, thus showing lesser amount of deep level defects. It is to be noted that as the quality of the film grown improves it results in elimination of such anomalies in I–V curve and results in more stable curve. Deep level defects correspond to the trap states found in forbidden band. These defects function as charge carrier trapping centres. Deep-level traps shorten the non-radiative life time of charge carriers, and through the Shockley–Read–Hall (SRH) process, thus aiding recombination of minority carriers, which has negative effects on the semiconductor device performance.
Recombination rate RT involved with traps is influenced mainly by density of trapping defects, the energy of the trapping level and the volume:
![]() | (8) |
![]() | (9) |
![]() | (10) |
These expressions are of the same form as the charge carrier concentration in terms of the Fermi energy level; we can deduce from the equation that if τh0 and τe0 are of the same order of magnitude, for this type of recombination the maximum value will occur when the defect level lies near the middle of the forbidden band gap. Therefore, energy levels introduced by near mid gap are very effective recombination centers.32
To confirm the presence of defect levels in the mid-gap region, ultrafast transient spectroscopy was performed in which a 320 nm pump beam was used to generate photoexcited carriers above the band-gap. The dynamics are studied by employing a white light continuum probe (1.55 to 2.92 eV). Fig. 7(a) shows the plot of differential absorption, ΔA (λ, t) (optical density) with wavelength, λ (nm) at a range of delay times, t (ps) from 0–100 ps. Three clearly distinguishable bands can be observed from a delay time of ∼0.5 ps to 10 ps. The first two bands have peaks at ∼474 nm (peak I) and 603 nm (peak II) and the third band is a convolution of two peaks which are approximated at 752 nm (IIIa) and 777 nm (IIIb). On comparing the results of the photoluminescence and transient absorption data (TS), significant differences are seen in the emission and carrier relaxation.35 It is observed that bands I, II and IIIb are blue shifted with respect to the PL peaks by 0.1–0.3 eV.36 A sequential analysis of this figure reveals a maximum in ΔA (λ, t) for the three bands at a delay time of ∼1.25 ps, on either side of which the absorption decreases. This implies that around 1.25 ps all the three bands saturate and the absorption of photons by carriers in the defect levels corresponding to these three bands decreases thereafter. The positive signal disappears by ∼20 ps indicating that the photoexcited carriers return to equilibrium. The experiment was conducted at a low fluence so as to minimize the stimulated emission. A small negative band corresponding to stimulated emission can be seen at ∼508 nm. Fig. 7(b) illustrates the temporal decay of ΔA at saturation for fixed values of λ and the corresponding fitted curve. A multi exponential decay model with the following equation:
![]() | (11) |
| Wavelength, λ (nm) | T0 (ps) | IRF (ps) | A1 (%) | τ1 (ps) | A2 (%) | τ2 (ps) |
|---|---|---|---|---|---|---|
| 474.3 | 0.4374 | 0.5009 | 97.9 | 5.35 | 2.11 | 500 |
| 506.6 | 0.9049 | 1.585 | 100 | 7.62 | — | — |
| 606.9 | 0.5799 | 0.5201 | 98.7 | 4.73 | 1.32 | 500 |
| 751.1 | 0.6964 | 0.5157 | 100 | 3.57 | — | — |
| 777.8 | 0.6868 | 0.5371 | 100 | 4.04 | — | — |
The small lateral size of V-pits determined from Fig. 2 and the value of screw and edge dislocation density as evident from the calculations based on Fig. 3 supplements the TS, in which we see that non radiative decay is the dominant relaxation mechanism for the photo-excited carriers.
The presence of the bands can also be due to two photon absorption and its contribution cannot be ruled out. However, the parameters obtained from the fit of the kinetic traces in the TS, I–V characteristics and the photoluminescence spectrum points towards the presence of mid-gap defect levels.
Footnote |
| † Academy of Science & Innovative Research (AcSIR), CSIR-NPL Campus, Dr K. S. Krishnan Road, New Delhi-110012, India. |
| This journal is © The Royal Society of Chemistry 2015 |