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Self-organized nanoclusters were obtained in annealed solution-processed In–Ga–Zn–O thin films. STEM and anomalous grazing incidence small-angle X-ray scattering (GISAXS) reveal the formation of nanometer-sized nanoclusters together with the spontaneous creation of a mesopore pattern.

Graphical abstract: Self-organized nanoclusters in solution-processed mesoporous In–Ga–Zn–O thin films

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