Issue 16, 2006
From the journal:

Dalton Transactions

Film growth precursor development for metal nitrides. Synthesis, structure, and volatility of molybdenum(vi) and tungsten(vi) complexes containing bis(imido)metal fragments and various nitrogen donor ligands

Oussama M. El-Kadri,a   Mary Jane Heega  and  Charles H. Winter*a  

* Corresponding authors

a Department of Chemistry, Wayne State University, 5101 Cass Avenue, Detroit, Michigan, USA

Abstract

The molybdenum and tungsten complexes W2(NtBu)4(pz)4(pzH)·(C6H14)0.5 (pz = pyrazolate), M(NtBu)2(Me2pz)2(Me2pzH)2 (Me2pz = 3,5-dimethylpyrazolate), M(NtBu)2(tBu2pz)2 (tBu2pz = 3,5-di-tert-butylpyrazolate), M2(NtBu)4(Me2pz)2Cl2, W(NtBu)2(C2N3(iPr)2)2py2, M(NtBu)2-(CN4CF3)2py2, and W(NtBu)2(PhNNNPh)2 were prepared by various synthetic routes from the starting materials Mo(NtBu)2Cl2, W(NtBu)2(NHtBu)2, and W(NtBu)2Cl2py2. These new complexes were characterized by spectral and analytical methods and by X-ray crystal structure determinations. The volatilities and thermal stabilities were evaluated to determine the potential of the new complexes for use in thin film growth of metal nitride films. Mo(NtBu)2(tBu2pz)2 and W(NtBu)2(tBu2pz)2 were found to have the optimum combination of volatility and thermal stability for application in atomic layer deposition thin film growth procedures.

Graphical abstract: Film growth precursor development for metal nitrides. Synthesis, structure, and volatility of molybdenum(vi) and tungsten(vi) complexes containing bis(imido)metal fragments and various nitrogen donor ligands

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Article information

DOI
https://doi.org/10.1039/B515378F
Article type
Paper
Submitted
31 Oct 2005
Accepted
22 Dec 2005
First published
12 Jan 2006

Dalton Trans., 2006, 1943-1953

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Film growth precursor development for metal nitrides. Synthesis, structure, and volatility of molybdenum(VI) and tungsten(VI) complexes containing bis(imido)metal fragments and various nitrogen donor ligands

O. M. El-Kadri, M. J. Heeg and C. H. Winter, Dalton Trans., 2006, 1943 DOI: 10.1039/B515378F

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