Issue 8, 2002

Arrays of self-sealed microchambers and channels

Abstract

Arrays of self-sealed structures have been grown on silicon mesas and lines, which consist of porous thin film centres enclosed by solid borders, and can be fabricated in a single step using a unique method of film growth called glancing angle deposition (GLAD). These specialized structures may have potential for use in microreactor, microfluidic, chromatographic, nano-assay, lab-on-a-chip, biochemical, and other related applications.

Graphical abstract: Arrays of self-sealed microchambers and channels

Article information

Article type
Paper
Submitted
13 Mar 2002
Accepted
11 Jun 2002
First published
27 Jun 2002

J. Mater. Chem., 2002,12, 2348-2351

Arrays of self-sealed microchambers and channels

M. Seto, K. Westra and M. Brett, J. Mater. Chem., 2002, 12, 2348 DOI: 10.1039/B204598M

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