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DOI: 10.1039/A905095G (Paper) Reference Section for: J. Mater. Chem., 1999, 9, 2433-2437

Studies of the thermal decomposition of some diselenocarbamato complexes of cadmium or zinc: molecular design for the deposition of MSe films by CVD

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Mohammed Chunggaze, M. Azad Malik and Paul O’Brien

Abstract

The compounds M(Se2CNEt2)2, M = Zn 1 or Cd 2, M(Se2CNMenHex)2, M = Zn 3 or Cd 4, and ZnEt(Se2CNEt2) 5 have been investigated by GC-MS and EI-MS in an attempt to determine why 1 and 2 often deposit films containing an excess of selenium by metal organic chemical vapour deposition (MOCVD) whereas 3, 4 and 5 give MSe (M = Zn or Cd). The EI-MS of all five selenium compounds revealed similar decomposition pathways, which start with loss of an alkyl group. However, studies of compounds 1–5 by pyrolysis GC-MS showed that selenium clusters Sen, n = 1–7, are formed in the vapour phase from 1 and 2. Compounds 1, 2 and 5 also form significant quantities of diethyl diselenide (EtSe2Et) in the ratio of 1∶0.9∶0.2 respectively, as detected by GC-MS, whereas 3 and 4 do not.

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