Aerosol-assisted chemical vapour deposition (AACVD) of silver films from triphenylphosphine adducts of silver β-diketonates and β-diketoiminates, including the structure of [Ag(hfac)(PPh₃)]

Abstract

Triphenylphosphine adducts of silver β-diketonates [AgL(PPh₃)] (L=acac, dpm, tfac, hfac, fod) and β-ketoiminates (L=hfacNhex, hfacNchex) have been synthesised and evaluated as precursors for the deposition of silver films using aerosol-assisted chemical vapour deposition methodology. The 1:1 stoichiometry of the adducts has been established by ³¹P and ¹⁰⁹Ag NMR and a crystal structure of [Ag(hfac)(PPh₃)]. The best films were obtained from the two β-ketoiminates, particularly L=hfacNhex. While [AgL(PPh₃)] (L=acac, dpm) gave almost no deposition, the complex with L=tfac gave a film comparable with the two β-ketoiminates while other films showed poor reflectivity (L=hfac, fod).

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