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DOI: 10.1039/A900342H (Paper) Reference Section for: J. Mater. Chem., 1999, 9, 1629-1633

Structure and growth characteristics of BaZrO3 films produced using an electrostatic assisted aerosol-gel deposition method

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B. Su and K. L. Choy

Abstract

BaZrO3 films have been fabricated using an electrostatic assisted aerosol-gel deposition (EAAD) method. The precursor was synthesised by reacting barium with 2-methoxyethanol and then mixed with zirconium n-propoxide in 2-methoxyethanol solvent. The aerosol was generated by electrostatic atomisation. The results showed that the aerosol was an oxo-alkoxide complex which transformed to BaZrO3 at temperatures above 800[thin space (1/6-em)]°C with some BaCO3 formed as an intermediate product. Amorphous aerosol-gel films were deposited at an optimum temperature of 400[thin space (1/6-em)]°C. Crystalline BaZrO3 films could be produced by repeating the deposition and heat-treatment at 800[thin space (1/6-em)]°C.

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