Selection of internal standard for determination of boron and phosphorus by ICP-MS in silicon photovoltaic materials

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Irina E. Vasilyeva, Elena V. Shabanova, Yulya V. Sokolnikova, Olga A. Proydakova and Valery I. Lozhkin


Abstract

A single-chamber autoclave with a heating plate was used for the acid dissolution of quartz and metallic silicon. Analysis was performed by ICP-MS. Comparison of 6Li, 7Li, 115In, 35Cl and 37Cl+36Ar1H was carried out for selecting the best internal standard taking into account instrumental drift. The selection criteria are discussed. 35Cl was selected as the internal standard.


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