Siegfried Däbritz, Enrico Langer and Wolfgang Hauffe
The simultaneous observation of X-ray reflections by a high-quality charge coupled device (CCD) camera in a scanning electron microscope is presented. The possibility of immediate further processing and evaluation of the images by computer, avoiding the extensive photographic X-ray film procedure, is discussed. The divergent beam X-ray method has considerable importance for investigations in materials research. The experimental set-up is described and the advantageous application of the camera is demonstrated for different examples.