Comparison of fundamental characteristics between radio-frequency and direct current powering of a single glow discharge atomic emission spectroscopy source

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Xiaohan Pan, Bin Hu, Yuancai Ye and R. Kenneth Marcus


Abstract

A comparison between radiofrequency (rf) and direct current (dc) powering of a single glow discharge atomic emission spectroscopy (GD-AES) source has been conducted. A NIST SRM 1252 Phosphorized Copper alloy was used as the cathode sample for a series of measurements. With each powering mode, the analyte emission, sputtering, and charged particle characteristics were investigated under its own optimized operating conditions. Comparison of the results indicates that the rf mode has higher analyte S/B values although the dc mode shows higher signal intensities. Rf-powered plasmas yield much shorter stabilization times and less variation over extended periods of operation. These two factors result in the general trend of the rf mode having lower detection limits for the suite of analytes. With the use of the S/B value as the quantitative measure, similar sample-to-sample reproducibility (5–10% RSD) can be achieved for both modes. The measurement of sputtered crater depths illustrates that the dc mode has a much higher sputtering rate. Finally, Langmuir probe measurements indicate that the rf mode has much higher electron energies and thus higher excitation efficiency.


References

  1. K. R. Hess and R. K. Marcus, Spectroscopy, 1987, 2, 24 Search PubMed.
  2. W. W. Harrison, C. M. Barshick, J. A. Klingler and Y. Mei, Anal. Chem., 1990, 62, 943A CAS.
  3. F. Paschen, Ann. Phys., 1916, 50, 901.
  4. H. Schuler, Z. Phys., 1929, 59, 149 CAS.
  5. W. Grimm, Spectrochim. Acta, Part B, 1968, 23, 443 CrossRef CAS.
  6. Glow Discharge Spectroscopies, ed. R. K. Marcus, Plenum Press, New York, 1993 Search PubMed.
  7. M. R. Winchester and R. K. Marcus, Appl. Spectrosc., 1988, 42, 941 CAS.
  8. D. M. P. Milton and R. C. Hutton, Spectrochim Acta, Part B, 1993, 48B, 39 CrossRef.
  9. J. W. Coburn and M. Chen, J. Appl. Phys., 1980, 51, 3134 CrossRef CAS.
  10. Plasma Etching, eds. D. M. Manos and D. L. Flamm, Academic Press, San Diego, 1989.
  11. D. C. Duckworth and R. K. Marcus, Anal. Chem., 1989, 61, 1879 CrossRef CAS.
  12. R. K. Marcus, T. R. Harville, Y. Mei and C. R. Shick, Jr., Anal. Chem., 1994, 66, 902A CAS.
  13. J. Marshall, A. Fisher, S. Chenery and S. T. Sparkes, J. Anal. At. Spectrom., 1996, 11, 213R RSC.
  14. R. K. Marcus, J. Anal. At. Spectrom., 1994, 9, 1029 RSC.
  15. R. Payling, D. G. Jones and S. A. Gower, Surf. Interface Anal., 1993, 20, 959 CrossRef CAS.
  16. F. Prassler, V. Hoffmann, J. Schumann and K. Wetzig, J. Anal. At. Spectrom., 1995, 10, 677 RSC.
  17. S. De Gendt, R. Van Grieken, W. Hang and W. W. Harrison, J. Anal. At. Spectrom., 1995, 10, 689 RSC.
  18. W. B. Cho, Y. A. Woo, H. J. Kim, I. J. Kim and W. K. Kang, Appl. Spectrosc., 1997, 51, 1060 CAS.
  19. R. Payling and D. G. Jones, Surf. Interface Anal., 1993, 20, 787 CrossRef CAS.
  20. M. R. Winchester, C. Lazik and R. K. Marcus, Spectrochim. Acta, Part B, 1991, 46, 483 CrossRef.
  21. T. R. Harville and R. K. Marcus, Anal. Chem., 1993, 65, 3636 CrossRef CAS.
  22. M. Parker, M. L. Hartenstein and R. K. Marcus, Anal. Chem., 1996, 68, 4213 CrossRef CAS.
  23. Y. Ye and R. K. Marcus, Spectrochim. Acta, Part B, 1995, 50, 997 CrossRef.
  24. Y. Ye and R. K. Marcus, Spectrochim. Acta, Part B, 1996, 51, 509 CrossRef.
  25. X. Pan and R. K. Marcus, in preparation.
  26. M. J. Heintz and G. M. Hieftje, Spectrochim. Acta, Part B, 1995, 50, 1109 CrossRef.
  27. N. H. Tolk, I. S. T. Tsong and C. W. White, Anal. Chem., 1977, 49, 16A CAS.
  28. P. R. Banks and M. W. Blades, Spectrochim. Acta, Part B, 1992, 47, 1203 CrossRef.
  29. P. W. J. M. Boumans and J. J. A. M. Vrakking, Spectrochim. Acta, Part B, 1987, 42, 819 CrossRef.
  30. T. R. Harville and R. K. Marcus, Anal. Chem., 1995, 67, 1271 CrossRef CAS.
  31. P. W. J. M. Boumans, Anal. Chem., 1972, 44, 1219 CrossRef CAS.
  32. C. Lazik and R. K. Marcus, Spectrochim. Acta, Part B, 1993, 48, 1673 CrossRef.
  33. A. P. Paranjpe, J. P. McVittie and S. A. Self, J. Appl. Phys., 1990, 67, 6718 CrossRef CAS.
  34. D. Fang and R. K. Marcus, Spectrochim. Acta, Part B, 1990, 45, 1053 CrossRef.
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